Piezoelectric Inkjet Actuator Strain Optimization
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Solution Overview
Problem
Piezoelectric vibration type ink-jet recording heads face challenges in achieving high density printing due to complex manufacturing processes and limited flexibility in arranging piezoelectric elements, and existing solutions do not efficiently utilize low driving voltages to achieve sufficient strain.
Innovation Solution
An actuator device with vibration plates and piezoelectric elements, where the ratio of piezoelectric constant d31 to elastic compliance S11E is greater than 5 C/m2, utilizing lead zirconate titanate (PZT) with additives like yttrium, cesium, or neodymium to enhance strain and stress generation, allowing for high density and efficient liquid ejection with low voltage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a piezoelectric element is carved for a pectinate shape to match nozzle orifice arrangement pitch, then high density printing is achieved, but manufacturing process becomes complex
Solution Approach 1:
The piezoelectric element is divided into multiple independent piezoelectric actuators, each corresponding to a specific pressure generating chamber and nozzle orifice. This segmentation allows each actuator to be independently controlled and optimized, simplifying the manufacturing process while maintaining high printing density through precise positioning of multiple smaller elements rather than one complex carved element.
2Ease of manufacture
If flexural vibration mode is used for piezoelectric actuator, then manufacturing process is simplified, but area requirement increases reducing high density arrangement capability
Solution Approach 1:
The piezoelectric actuators are arranged in a planar configuration on the vibration plate, utilizing two-dimensional space efficiently. By transitioning from three-dimensional bulk piezoelectric elements to thin-film deposited structures, the design achieves simplified manufacturing through deposition processes while maintaining compact footprint for high-density nozzle arrangement through optimized planar layout of the actuators.
3Ease of manufacture
If uniform piezoelectric material layer is formed and carved by lithography, then manufacturing process is simplified and high speed drive is enabled, but strain generation with low driving voltage is insufficient
Solution Approach 1:
The piezoelectric material composition is optimized by adjusting the ratio of Zr to Ti atoms and adding specific amounts of dopant atoms (Y, Nb, Ta, Sb, or W). This parameter optimization enhances the piezoelectric coefficients (d31 and d33) of the material, enabling sufficient strain generation even with low driving voltages while maintaining the simplified thin-film fabrication process and high-speed drive capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables high strain and stress generation with low driving voltage, improving ejection characteristics and enabling high-density liquid-jet heads with simplified manufacturing processes.
Implementation Method 1
a piezoelectric element which is displaced according to an applied voltage
Data Source
AI summary
An actuator device including vibration plates formed on one side of a substrate; and piezoelectric elements mounted through the vibration plates and each including a lower electrode, a piezoelectric layer, and an upper electrode, wherein a ratio d31/S11E of a piezoelectric constant d31 of the piezoelectric layer to an elastic compliance S11E of the piezoelectric layer is greater than 5 C/m2, and the elastic compliance S11E of each vibration plate is greater than 2×10−8 m2/N.