Piezoelectric Linear Actuator Thinning via Lateral Expansion
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Solution Overview
Problem
The demand for smaller gas supply systems in semiconductor manufacturing has hindered the downsizing of valves and flow controllers due to the difficulty in reducing the thrust required for valve opening and closing operations, which is influenced by flow, pressure, and other conditions, making it challenging to miniaturize laminated piezoelectric actuators.
Innovation Solution
A piezoelectric linear actuator with a cylindrical laminated piezoelectric actuator, lateral support members, displacement transfer members, and an output part that locks to these members, allowing for efficient displacement transfer and minimizing the actuator's thickness by aggregating structural components on either side, matching their width dimension, thereby enabling significant thinning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If a laminated piezoelectric actuator is used for valve actuation, then the valve can be operated with high responsiveness and accuracy, but the actuator cannot be simply downsized due to thrust requirements determined by flow and pressure conditions
Solution Approach 1:
The patent reorients the actuator from a conventional longitudinal configuration to a lateral configuration, where the piezoelectric element expands in the lateral direction rather than the longitudinal direction. This dimensional change allows the actuator to generate the required thrust while reducing the longitudinal thickness, enabling downsizing without sacrificing responsiveness or thrust capability.
Solution Approach 2:
The patent employs an asymmetric structural configuration where the actuator components are arranged with different dimensions in different directions. The lateral width is designed to accommodate the piezoelectric element's expansion direction, while the longitudinal thickness is minimized. This asymmetric design allows the actuator to maintain structural integrity and thrust generation capability while achieving a thinned profile for downsizing applications.
2Volume of moving object
If the actuator thickness is reduced to achieve downsizing, then the overall device size can be reduced, but the thrust necessary for valve opening and closing operations may be insufficient
Solution Approach 1:
The patent compensates for reduced thickness by redirecting the force generation to the lateral dimension. The piezoelectric element is configured to expand laterally, and this lateral expansion is mechanically converted into longitudinal thrust through the coupling mechanism. This allows the actuator to generate sufficient thrust despite the reduced thickness, resolving the contradiction between miniaturization and force generation.
Solution Approach 2:
The patent integrates the piezoelectric element, support members, and coupling mechanism into a unified compact structure where the lateral expansion of the piezoelectric element is directly coupled to the longitudinal motion of the output shaft. This merging of functions within a compact lateral configuration enables the thin actuator to generate the required thrust through efficient mechanical coupling rather than relying on longitudinal expansion.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for the significant thinning of both the piezoelectric linear actuator and the associated flow controller, achieving a reduced thickness comparable to the laminated piezoelectric actuator's width dimension, enhancing the miniaturization of gas supply system components.
Implementation Method 1
a pair of displacement transfer members extending along the left and right sides of the laminated piezoelectric actuator, respectively, to slidably intersect the lower support member and transferring displacement due to the piezoelectric effect of the laminated piezoelectric actuator
Data Source
AI summary
A piezoelectric linear actuator comprising a laminated piezoelectric actuator having a cylindrical shape; a lower support member supporting the laminated piezoelectric actuator and extending laterally to the left and right of the laminated piezoelectric actuator; a pair of displacement transfer members extending along the left and right sides of the laminated piezoelectric actuator, respectively, to slidably intersect the lower support member and transferring displacement due to the piezoelectric effect of the laminated piezoelectric actuator; and an output part locked to the pair of displacement transfer members below the lower support member and coupling lower end portions of the displacement transfer members, wherein the pair of displacement transfer members are formed to have a width dimension that is the same or substantially the same as the width dimension of the laminated piezoelectric actuator.