Piezoelectric Layer Orientation for Low Voltage Liquid Jet Head
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing piezoelectric elements in liquid jet heads and actuators fail to achieve satisfactory displacement with low driving voltage, limiting their precision and efficiency.
Innovation Solution
A liquid jet head and actuator apparatus featuring a piezoelectric layer with a thickness of 5 μm or less, formed of perovskite type crystals, where the distance between specific X-ray diffraction peak positions is within a predetermined range, allowing for large displacement with low driving voltage and improved crystallinity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a piezoelectric element is used in a liquid jet head, then liquid ejection function is achieved, but satisfactory displacement cannot be obtained with low driving voltage
Solution Approach 1:
The patent changes the crystallographic orientation parameters of the piezoelectric layer by controlling the X-ray diffraction peak position distance to be within 2θ=25.487±0.1°, and optimizes the thickness parameter to 5 μm or less. These parameter changes enable the piezoelectric element to achieve large displacement with low driving voltage, resolving the contradiction between displacement precision and energy consumption.
2Power
If conventional piezoelectric materials are used, then basic functionality is achieved, but large displacement with low driving voltage cannot be obtained
Solution Approach 1:
The patent optimizes the piezoelectric layer parameters by controlling thickness to 5 μm or less and X-ray diffraction peak position distance to 2θ=25.487±0.1°. These parameter changes enable the material to achieve high displacement output with low driving voltage, overcoming the limitations of conventional piezoelectric materials that require high voltage for adequate displacement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables a piezoelectric element capable of achieving large displacement with low driving voltage, resulting in excellent liquid jet characteristics and reduced declination of the crystal lattice, enhancing the overall performance of the liquid jet head and actuator apparatus.
Implementation Method 1
a piezoelectric element provided with a piezoelectric film formed of a piezoelectric material having a function of electrical-mechanical conversion between two electrodes
Implementation Method 2
the distance between the diffraction peak position of an X-ray derived from a surface (220) of the flow passage forming substrate and the diffraction peak position of an X-ray derived from a surface (100) of the piezoelectric layer
Data Source
AI summary
A liquid jet head includes a flow passage forming substrate formed of a crystal substrate provided with a pressure generating chamber communicating with nozzle openings, and a piezoelectric element including a lower electrode, a piezoelectric layer, and an upper electrode, which are provided on the flow passage forming substrate to change pressure in the pressure generating chamber. The piezoelectric layer has a thickness of 5 μm or less and is formed of perovskite type crystals, and the distance between a diffraction peak position A of an X-ray derived from a surface (220) of the flow passage forming substrate and a diffraction peak position B of an X-ray derived from a surface (100) of the piezoelectric layer is within the range of 2θ=25.487±0.1°.