Embedded Piezo Membrane for Precise Fluid Chamber Volume Control
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Solution Overview
Problem
Existing fluid devices face challenges in precisely and efficiently changing the volume of a fluid chamber, particularly in applications requiring controlled underpressure and energy-efficient operation.
Innovation Solution
A fluid device with a rubber-elastic membrane element and an embedded piezoactuator drive section, where the piezoactuator's deformation is transmitted to the membrane working section, allowing for precise volume control with low energy consumption and compact dimensions, enabling reliable operation even with aggressive fluids.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a piezoactuator is used to deform the membrane element for volume control, then the volume change precision is improved, but the device complexity increases due to the need for embedded drive section and electrical connections
Solution Approach 1:
The piezoactuator's drive section is embedded within and enveloped by the rubber-elastic membrane element, creating a nested structure where the actuator is integrated into the membrane's thickness. This nesting approach reduces the overall device footprint and simplifies the external structure while maintaining precise volume control capabilities through the piezoelectric effect.
2Volume of moving object
If the piezoactuator drive section is embedded into the membrane element, then the device dimensions are reduced, but the manufacturing complexity increases due to the enveloping structure
Solution Approach 1:
The membrane element's material properties are utilized to enable the enveloping of the drive section. By selecting rubber-elastic material with appropriate mechanical properties, the membrane can be formed to surround the piezoelectric actuator during manufacturing processes such as injection molding or compression molding, achieving compact integration without excessive manufacturing complexity.
3Use of energy by moving object
If the membrane element is made rubber-elastic for low drive forces, then the energy consumption is reduced, but the structural strength decreases
Solution Approach 1:
The system combines the rubber-elastic membrane element with the piezoelectric actuator to create a composite structure that leverages the advantages of both materials. The piezoelectric material provides the necessary actuation force and precision, while the rubber-elastic membrane provides flexibility and low energy requirements for deformation, together achieving both low energy consumption and sufficient structural strength.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables precise, energy-efficient control of the fluid chamber volume, preventing post-dripping in metering procedures and allowing for reliable operation across various applications, including semiconductor manufacturing and laboratory automation.
Implementation Method 1
An operating voltage of a variable magnitude can be applied to the piezoactuator, from which voltage a reversible shape change of the drive section results according to the inverse piezoelectric effect
Implementation Method 2
the membrane element consists of a rubber-elastic material, wherein the piezoactuator comprises a drive section which extends along the membrane working section, is embedded into the membrane element and is enveloped by the rubber-elastic material of the membrane element
Data Source
AI summary
A fluid device including a fluid chamber which is designed for receiving a fluid and which is commonly delimited by a device housing and a bending-elastic membrane element. The membrane element with a peripheral edge section is fixed to the device housing in a fluid-tight manner and has a membrane working section which is framed by the peripheral edge section and which for the change of the volume of the fluid chamber can be elastically deflected by a piezoactuator. The membrane element consists of a rubber-elastic material, wherein the piezoactuator comprises a drive section which extends along the membrane working section, is embedded into the membrane element and is enveloped by the rubber-elastic material of the membrane element.