Piezo MEMS Mirror Drive Circuit With Single-Supply Control
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Solution Overview
Problem
MEMS mirrors have complex electronics that complicate their driving and require improvements for efficient operation.
Innovation Solution
A MEMS mirror apparatus with at least two piezo actuators connected to each other and controlled by a single supply drive signal, utilizing pulse width modulation and square waves to simplify electronics and reduce power consumption.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If traditional separate drive signals with negative voltages are used for each piezo actuator, then precise control of MEMS mirror movement is achieved, but device complexity and power consumption increase
Solution Approach 1:
The patent combines multiple separate drive signals into a single supply drive signal that simultaneously controls multiple piezo actuators. The single supply drive signal source generates one signal that is distributed to multiple actuators through a summing network, merging what would traditionally require separate signal generators and reducing overall system complexity while maintaining control precision.
Solution Approach 2:
The single supply drive signal serves multiple functions simultaneously: it provides the drive signal for all piezo actuators, establishes the common reference potential, and enables precise control of mirror movement. This multi-functional approach eliminates the need for separate ground connections and negative voltage supplies for each actuator.
2Use of energy by stationary object
If separate ground connections and negative voltage supplies are provided for each piezo actuator, then accurate control of mirror deflection is maintained, but power consumption and device cost increase
Solution Approach 1:
The patent merges multiple ground connections into a single common reference potential that serves all piezo actuators. By combining the reference potentials and eliminating separate negative voltage supplies, the system reduces power consumption while the summing network maintains the precise voltage relationships needed for accurate mirror deflection control.
3Device complexity
If complex electronic driving circuits are used for each piezo actuator, then precise control of MEMS mirror is achieved, but manufacturing cost and device complexity increase
Solution Approach 1:
The patent merges multiple independent driving circuits into a single supply drive signal source that controls all piezo actuators through a summing network. This consolidation dramatically reduces circuit complexity and manufacturing cost while the network architecture preserves the precise voltage control needed for accurate mirror positioning.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Simplified electronics, reduced power requirements, and cost savings are achieved by eliminating the need for negative voltages and separate ground connections, while enabling efficient control of MEMS mirror movement.
Implementation Method 1
at least two piezo actuators, wherein the at least two piezo actuators are connected to each other and configured to control, or controlling, movement of the MEMS mirror
Data Source
AI summary
According to an example aspect of the present invention, there is provided a Microelectromechanical System, MEMS, mirror apparatus, comprising a MEMS mirror and at least two piezo actuators, wherein the at least two piezo actuators are connected to each other and configured to control, or controlling, movement of the MEMS mirror and a single supply drive signal connected to each of the at least two piezo actuators.