Piezoelectric Scanner Mirror Deformation Control
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Solution Overview
Problem
Dynamic deformations of mirrors in Micro-Electro Mechanical Systems (MEMS) scanners degrade optical resolution and performance, as existing solutions like mirror support attachment structures are insufficient in fully addressing this issue.
Innovation Solution
Incorporation of piezoelectric elements directly attached to the mirror and springs, with specific electrode and piezoelectric layer configurations, to suppress mirror dynamic deformations by applying controlled excitation voltages that balance tension and compression states during mirror rotation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If mirror support attachment structures are used to reduce mirror dynamic deformation, then structural stability is improved, but device complexity increases
Solution Approach 1:
The patent replaces complex mechanical attachment structures with piezoelectric elements that use electrical fields to generate mechanical forces. Instead of relying on mechanical springs and attachment points to control mirror deformation, piezoelectric actuators apply precise electrical signals to counteract dynamic deformations, thereby reducing mechanical complexity while maintaining stability.
Solution Approach 2:
The patent changes the physical state and properties of the mirror support system by introducing piezoelectric materials that can dynamically adjust their mechanical properties through electrical field application. By controlling the electrical parameters (voltage, frequency, phase) applied to the piezoelectric elements, the system can adaptively compensate for mirror deformations without requiring complex mechanical adjustments.
2Manufacturing precision
If piezoelectric elements are added to suppress mirror dynamic deformations, then manufacturing precision is improved, but device complexity increases
Solution Approach 1:
The piezoelectric elements serve multiple functions simultaneously: they act as both structural support components and active deformation control actuators. The same piezoelectric elements that provide mechanical support also generate the forces needed to suppress dynamic deformations when electrical signals are applied, thereby improving manufacturing precision without requiring separate correction mechanisms.
Solution Approach 2:
The patent employs composite structures combining piezoelectric materials with traditional scanner components. The piezoelectric elements are integrated into the mirror support assembly, creating a composite system that leverages both the mechanical properties of the support structure and the electro-mechanical conversion capabilities of the piezoelectric materials to achieve precise deformation control.
3Stability of the object's composition
If complex electrode and piezoelectric layer configurations are used, then mirror deformation suppression is improved, but ease of manufacture deteriorates
Solution Approach 1:
The patent divides the piezoelectric control system into multiple discrete elements positioned at specific locations around the mirror support. Each piezoelectric element can be independently fabricated and controlled, allowing for modular assembly. This segmentation simplifies the manufacturing process by breaking down the complex task of creating large-scale piezoelectric structures into manageable, repeatable units that can be produced using standard fabrication techniques.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Significantly reduces mirror dynamic deformations from +/-529 nm to +/-43 nm, enhancing optical resolution and performance by effectively stabilizing the mirror's rotation.
Implementation Method 1
the first and second piezoelectric elements are directly attached to the insulation layer. The first piezoelectric element has a first portion above the first spring, a mid-range portion above the mirror and a second portion above the second spring
Implementation Method 2
a first and second springs
Data Source
AI summary
A scanner comprises a mirror, a first and second springs, an insulation layer and a first and second piezoelectric elements. The insulation layer is directly attached to the mirror and the first and second springs. The first and second piezoelectric elements are directly attached to the insulation layer. The first piezoelectric element has a first portion above the first spring, a mid-range portion above the mirror and a second portion above the second spring. The second piezoelectric element has a first portion above the first spring, a mid-range portion above the mirror and a second portion above the second spring. The first piezoelectric element has a first upper electrode layer, a first piezoelectric layer and a first lower electrode layer. The second piezoelectric element has a second upper electrode layer, a second piezoelectric layer and a second lower electrode layer. The first upper electrode layer of the first piezoelectric element and the second lower electrode layer of the second piezoelectric element are electrically connected to a first electrode. The first lower electrode layer of the first piezoelectric element and the second upper electrode layer of the second piezoelectric element are electrically connected to a second electrode.