Piezoelectric Scanner Elastic Body Rigidity
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Solution Overview
Problem
Scanning probe microscopes face challenges in increasing scanning speed while maintaining a wide scanning range, as existing technologies often result in narrowing of the scanning range when attempting to enhance speed.
Innovation Solution
Incorporating a cylindrical case with a piezoelectric scanner and a sample holder, along with an elastic body, such as an O ring or spring, to increase axial and flexural rigidity, allowing for higher resonance frequencies and thus faster scanning speeds without reducing the scanning range.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the scanning speed is increased, then the productivity is improved, but the scanning range narrows
Solution Approach 1:
The patent employs a composite structure combining a rigid case with an elastic body (such as an O-ring or spring) to create a hybrid support system. This composite construction allows the rigid case to provide structural stability and maintain scanning range, while the elastic body provides the necessary flexibility and damping to support high-speed scanning movements without compromising the overall scanning area.
2Productivity
If the scanning speed is increased, then the productivity is improved, but the resonance frequency requirements become more stringent
Solution Approach 1:
The patent modifies the mechanical parameters of the support structure by introducing an elastic body with specific elastic coefficients. This changes the dynamic characteristics of the system, allowing it to operate at higher scanning speeds while maintaining stable resonance frequencies. The elastic body's mechanical properties are selected to optimize the balance between scanning speed and resonance stability.
3Speed
If the rigidity of the support structure is increased, then the scanning speed is improved, but the flexibility to accommodate thermal expansion is reduced
Solution Approach 1:
The patent transitions from a purely rigid support structure to a dynamic system that incorporates an elastic body. This elastic component provides the necessary compliance to accommodate thermal expansion and contraction while maintaining the rigidity required for high-speed scanning. The system dynamically adapts to temperature changes through the elastic deformation of the support body.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively raises scanning speeds in multiple axes while preventing the narrowing of the scanning range, enhancing the microscope's performance and preventing water intrusion between components.
Implementation Method 1
The piezoelectric scanner includes: a first end in an axis direction; a second end on a side opposite to the first end in the axis direction; a first electrode portion to which a voltage is applied such that the piezoelectric scanner is displaced in the axis direction; and a second electrode portion to which a voltage is applied such that the piezoelectric scanner is displaced in a direction orthogonal to the axis direction.
Implementation Method 2
In order to raise a resonance frequency of the actuator, at least one elastic body is disposed between the case and the actuator.
Data Source
AI summary
A scanning probe microscope includes a case, an actuator, at least one elastic body, and a probe. The actuator includes a piezoelectric scanner having a cylindrical shape and a sample holder. The piezoelectric scanner is disposed inside the case to be coaxial with the case such that the first end is fixed to the bottom portion. The sample holder is provided at a second end of the piezoelectric scanner. At least one elastic body is disposed so as to be sandwiched between the case and at least one of the piezoelectric scanner and the sample holder.