2D Piezoelectric Table Layout Without Lead-Induced Positioning Error

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Solution Overview

Problem

High-accuracy positioning and stability in linear or rotary tables are compromised due to interference from connecting leads of piezoelectric linear drives, especially in applications requiring nanometer-range precision, as these leads can introduce stiffness and affect movement linearity.

Innovation Solution

A central slider plate is introduced between the stator and the upper slider plate, with independent piezoelectric linear drives attached to the stator, eliminating the need for a movable connecting line and ensuring interference-free movement by allowing direct contact between the drives and the slider plates through openings, enabling sub-nanometer positional accuracy and high linearity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If connecting leads are used to supply the second piezoelectric linear drive mounted on the movable central slider plate, then the drive can be positioned independently, but the leads interfere with the movement and reduce positioning accuracy in the nanometer range

Engineering Contradiction:
ImproveIndependent positioning capabilityVSAvoidPositioning accuracy
Core Design Contradiction:
Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

The connecting leads are completely removed from the system. The second piezoelectric linear drive is powered through the central slider plate itself, which acts as a stationary power supply carrier. This extraction of the harmful element (leads) eliminates their interference with movement while preserving the independent positioning capability of the second drive.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The central slider plate serves as an intermediary between the stationary power supply and the second piezoelectric linear drive. Instead of using flexible leads to connect power, the plate itself becomes the power transmission medium, eliminating the need for movable connecting lines while enabling independent drive operation.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Adaptability or versatility

If the second piezoelectric linear drive is mounted on the movable central slider plate, then two-dimensional movement is enabled, but the stiffness of connecting leads affects movement linearity and stability

Engineering Contradiction:
ImproveTwo-dimensional movement capabilityVSAvoidMovement linearity
Core Design Contradiction:
Adaptability or versatilityVSStability of the object's composition

Solution Approach 1:

The connecting leads are removed from the system entirely. Power and control signals are transmitted through the central slider plate structure itself, eliminating the flexible but stiff connecting elements that compromised movement linearity. This enables precise two-dimensional movement without the stability issues introduced by lead stiffness.

Inventive Principle:
Principle #2Taking out (Extraction)

3Ease of operation

If a movable connecting line is used for the second piezoelectric linear drive, then the drive can move with the central slider plate, but even the slightest interference affects positioning and movement linearity

Engineering Contradiction:
ImproveDrive mobilityVSAvoidMovement linearity
Core Design Contradiction:
Ease of operationVSManufacturing precision

Solution Approach 1:

The movable connecting line is completely extracted from the system. The second piezoelectric linear drive is integrated directly onto the central slider plate, which serves as both the mounting structure and the power supply carrier. This eliminates the need for any connecting lines while maintaining full drive mobility and achieving superior movement linearity.

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration allows for reliable, slip-free transmission of motion with enhanced stability and accuracy in two-dimensional movement, maintaining high positioning precision and long-term stability even at high dynamics and fast response speeds.

Implementation Method 1

at least two piezoelectric linear drives for moving the upper slider plate in the two translational directions or two rotary directions

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS20240253170A1Linear or rotary table movable in two dimensions
Publication Date: 2024.08.01 PHYSIK INSTRUMENTE (PI) GMBH & CO KG
  • US20240253170A1 patent drawing
  • US20240253170A1 patent drawing
  • US20240253170A1 patent drawing

AI summary

A linear or rotary table is provided which can be moved in two dimensions having a stator and at least one upper slider plate movable relative to the stator in two independent translational directions or two independent rotary directions, and at least two piezoelectric linear drives for moving the upper slider plate in the two translational directions or two rotary directions, wherein a central slider plate is arranged between the stator and the upper slider plate, and the at least two piezoelectric linear drives are each attached to the stator to move the upper slider plate in the two translational directions or two rotary directions, and wherein at least one piezoelectric linear drive attached to the stator is in contact with the upper slider plate through an opening in the central slider plate to move the upper slider plate in a first translational direction or a first rotary direction.