Piezoelectric Actuator Units for Vibration Control in Optical Equipment

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Solution Overview

Problem

Existing vibration control systems for structures like electron beam lithography apparatuses are complex and not versatile enough to effectively manage vibrations across various apparatuses, leading to relative displacements that affect the precision of operations.

Innovation Solution

A compact vibration control system using actuator units with piezoelectric elements that expand and contract to control vibrations, coupled with a vibration detector and controller to adjust voltages based on detected vibration status, ensuring effective vibration management across different apparatuses.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional vibration control mechanisms are used, then vibration control capability is achieved, but device complexity increases

Engineering Contradiction:

Improvevibration control capabilityVSAvoidsystem complexity

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The vibration control system is segmented into multiple independent actuator units, each comprising a piezoelectric element, positioning sensor, and control circuit. These modular units are distributed around the optical column circumference, allowing independent operation and simplifying the overall system architecture while maintaining effective vibration control capability.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The actuator units are designed with multi-functionality, serving both as vibration control actuators and as positioning mechanisms. The piezoelectric elements can operate in different modes (expansion/contraction for vibration control, positioning for alignment), reducing the need for separate systems and thereby decreasing overall device complexity.

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Reliability

If multiple actuator units are distributed around the optical column, then vibration control effectiveness is improved, but device complexity increases

Engineering Contradiction:

Improvevibration control effectivenessVSAvoidconfiguration complexity

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The actuator units are positioned at asymmetric angular intervals around the optical column rather than uniform distribution. This asymmetric arrangement optimizes vibration control effectiveness for specific vibration modes while simplifying the mechanical configuration and reducing the number of actuators needed compared to a symmetric full-circle distribution.

Inventive Principle:

Principle #4Asymmetry

Solution Approach 2:

Multiple functional components (piezoelectric element, positioning sensor, control circuit) are merged into integrated actuator units that are directly mounted on the optical column. This consolidation reduces the number of separate components and connections needed, thereby decreasing configuration complexity while maintaining comprehensive vibration control effectiveness.

Inventive Principle:

Principle #5Merging (Combining)

3Speed

If piezoelectric elements are used for actuation, then response speed is improved, but manufacturing complexity increases

Engineering Contradiction:

Improveresponse speedVSAvoidmanufacturing complexity

Core Design Contradiction:

SpeedVSEase of manufacture

Solution Approach 1:

Piezoelectric elements are applied locally at specific positions around the optical column rather than throughout the entire structure. This localized application maintains the high response speed advantage of piezoelectric materials where needed while reducing overall manufacturing complexity and cost compared to full-structure piezoelectric actuation.

Inventive Principle:

Principle #3Local quality

Solution Approach 2:

The patent uses small, inexpensive piezoelectric ceramic elements that can be easily replaced if needed. These compact piezoelectric components are more economical and simpler to manufacture than large-scale alternative actuation systems, achieving high response speed with reduced manufacturing complexity through the use of standardized, off-the-shelf piezoelectric components.

Inventive Principle:

Principle #27Cheap short-living objects (Disposable)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system provides a simple, versatile, and effective means to control vibrations, reducing relative displacements and enhancing operational precision in various structures and equipment, such as electron beam lithography apparatuses.

Implementation Method 1

actuator units each including a piezoelectric element configured to expand and contract

Methodology Applied

Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS10607810B2Vibration control system and optical equipment equipped therewith

Publication Date: 2020.03.31 NUFLARE TECH INC

AI summary

The vibration control system configured to control vibration of a vibration-controlled object is disclosed. The vibration control system comprises: (i) actuator units each including a piezoelectric element configured to expand and contract; (ii) a drive power source configured to supply drive voltages to the piezoelectric elements of the actuator units for causing the piezoelectric elements to expand and contract; (iii) a vibration detector configured to detect a status of vibration of the vibration-controlled object; and (iv) a vibration controller configured to control the vibration of the vibration-controlled object by controlling the voltages supplied by the drive power source to the piezoelectric elements of the actuator units based on the status of vibration detected by the vibration detector, respectively.