Piezoelectric Vibration Sensor with Elastic Proof Mass

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Solution Overview

Problem

Conventional vibration sensors fail to detect low-frequency vibrations as the portion responsible for converting vibrations into electrical signals does not vibrate relative to the test object, preventing effective signal conversion.

Innovation Solution

A vibration sensor design that includes a sensor housing, a piezoelectric substrate, an amplifier, a deformable layer, and a heavy object, where the piezoelectric substrate is fixed inside the housing and vibrates synchronously with the housing, and the deformable layer is elastic, allowing relative vibration and effective signal conversion of low-frequency vibrations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the piezoelectric substrate is fixed to the sensor housing to vibrate synchronously with the housing, then the sensor can detect high-frequency vibrations, but the piezoelectric substrate does not vibrate relative to the housing for low-frequency vibrations, preventing signal conversion

Engineering Contradiction:
Improvevibration detection capabilityVSAvoidlow-frequency vibration detection
Core Design Contradiction:
Measurement precisionVSAdaptability or versatility

Solution Approach 1:

The sensor is divided into two functional segments: the piezoelectric substrate fixed to the housing for high-frequency detection, and the proof mass connected via elastic element for low-frequency detection. Each segment operates independently to detect different frequency ranges, resolving the contradiction between high-frequency and low-frequency detection capabilities.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The elastic element serves as an intermediary between the piezoelectric substrate and the proof mass. It transmits low-frequency vibrations to the piezoelectric substrate while allowing the proof mass to move relative to the housing, enabling low-frequency vibration conversion into electrical signals.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Stability of the object's composition

If the piezoelectric substrate is rigidly fixed inside the sensor housing, then the structure is stable, but relative vibration between the piezoelectric substrate and housing is prevented, eliminating signal generation

Engineering Contradiction:
Improvestructural stabilityVSAvoidsignal conversion reliability
Core Design Contradiction:
Stability of the object's compositionVSReliability

Solution Approach 1:

The fixed structure is segmented into the housing-mounted piezoelectric substrate and the separately mounted proof mass. This segmentation allows the piezoelectric substrate to remain stable in the housing while the proof mass can move relative to it during low-frequency vibrations, maintaining both structural stability and signal conversion reliability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The elastic element acts as an intermediary that connects the proof mass to the piezoelectric substrate. It maintains structural stability by providing a defined mechanical connection while enabling the necessary relative motion for signal generation during low-frequency vibrations.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables the detection of low-frequency vibrations by ensuring the piezoelectric substrate and deformable layer vibrate relative to each other, allowing for the conversion of these vibrations into electrical signals, thereby facilitating their detection.

Implementation Method 1

a piezoelectric substrate to vibrate together with the sensor housing in synchronism with vibration of the sensor housing... converts the vibration of the predetermined portion into an electrical signal

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

a deformable layer being elastic and having a first surface adhered to a second surface of the piezoelectric substrate

Methodology Applied
Scientific EffectPiezoresistive effect: Piezoresistive Effect

Data Source

PatentUS11913828B2Vibration sensor
Publication Date: 2024.02.27 MITSUBISHI ELECTRIC CORP
  • US11913828B2 patent drawing
  • US11913828B2 patent drawing
  • US11913828B2 patent drawing

AI summary

A test object includes a sensor housing for vibrating together with a test object in synchronism with vibration of the test object; a piezoelectric substrate for vibrating together with the sensor housing in synchronism with vibration of the sensor housing, where a first interdigital electrode, a first terminal, a second interdigital electrode, and a second terminal are disposed on a first surface of the piezoelectric substrate, and the piezoelectric substrate is disposed inside the sensor housing to be fixed to the sensor housing; an amplifier for receiving a signal output from the second terminal as an input signal, amplifying the received input signal, and transmitting the input signal after the amplification to the first terminal as an output signal; a deformable layer being elastic and having a first surface adhered to a second surface of the piezoelectric substrate; and a heavy object having a first surface adhered to a second surface of the deformable layer.