Piezoelectric Vibrator Element Side Surface Electrode Segmentation
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Solution Overview
Problem
The miniaturization of piezoelectric vibrator elements leads to weakened connection parts, increasing the risk of damage during segmentation due to stress, and existing manufacturing methods struggle to prevent short circuits while narrowing the connection width.
Innovation Solution
Forming at least one extending electrode on the side surface of the connection part, rather than on the principal surface, allows for a narrower connection width without risking short circuits, facilitating easier cutting and reducing damage during segmentation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If the connection part is narrowed to facilitate easy cutting during segmentation, then the ease of manufacture improves, but the strength of the connection part deteriorates, increasing the risk of damage during segmentation
Solution Approach 1:
The extending electrodes are repositioned from the principal surface to the side surface of the connection part. This dimensional change allows the connection part width to be reduced for easier cutting while the electrodes remain functional on the side surface, resolving the contradiction between ease of cutting and connection strength
2Reliability
If the connection part is narrowed to prevent short circuit between extending electrodes, then the reliability improves, but the ease of manufacture deteriorates due to increased patterning difficulty
Solution Approach 1:
By moving the extending electrodes to the side surface of the connection part, the patent eliminates the need for high-precision patterning on the principal surface. The electrodes are formed on the side surface where spacing requirements are relaxed, maintaining reliability while improving ease of manufacture
3Volume of moving object
If the piezoelectric vibrator element is miniaturized to meet demand for smaller devices, then the volume of the product improves, but the strength of each part deteriorates, increasing susceptibility to damage during segmentation
Solution Approach 1:
The patent enables miniaturization by relocating extending electrodes to the side surface, which allows the connection part to be narrowed without compromising electrode functionality. This resolves the conflict between miniaturization and structural strength, as the narrowed connection part can be easily cut while maintaining adequate strength through the side-surface electrode configuration
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the formation of narrower connection parts, preventing short circuits and reducing the risk of damage during segmentation, thus enhancing the manufacturing process for miniaturized piezoelectric vibrator elements.
Implementation Method 1
a piezoelectric vibrator element including a piezoelectric plate, and a pair of excitation electrodes formed on the piezoelectric plate and adapted to vibrate the piezoelectric plate when a predetermined drive voltage is applied
Data Source
AI summary
There is provided a method of manufacturing a piezoelectric vibrator element capable of preventing the piezoelectric vibrator element from being damaged when segmentallizing the piezoelectric vibrator element. The method of manufacturing a piezoelectric vibrator element includes the steps of providing the wafer with the piezoelectric plate and a frame part adapted to support the piezoelectric plate via a connection part, providing a pair of excitation electrodes to the piezoelectric plate, and forming a pair of extending electrodes extending from the piezoelectric plate to the frame part through the connection part and electrically connected respectively to the pair of excitation electrodes, and segmentallizing the piezoelectric plate by cutting the connection part. In the step of providing the pair of excitation electrodes, the pair of extending electrodes are formed on a side surface of the connection part.