Piezoelectric Actuator Wiring Deformation Efficiency
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Solution Overview
Problem
The existing piezoelectric actuators experience a reduction in bending efficiency due to the wiring provided on the support body, as the wiring deforms in opposite directions to the piezoelectric bodies, canceling out part of the deformation and reducing the overall bending efficiency.
Innovation Solution
A piezoelectric actuator design with a support member featuring a frame body and a thinner support body, where the wiring is formed of metal films and integrated into the structure to prevent deformation in opposite directions, and a manufacturing method that includes forming metal wirings without dielectric material to enhance bending efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If wiring is provided on the support body to electrically couple electrodes, then electrical connectivity is achieved, but the wiring deforms in opposite directions to piezoelectric bodies and reduces bending efficiency
Solution Approach 1:
The patent extracts the wiring from the piezoelectric actuator structure by forming it in a separate layer above the piezoelectric bodies. This separation prevents the wiring from interfering with the deformation of the piezoelectric bodies, eliminating the cancellation effect that reduced bending efficiency while maintaining electrical connectivity through the elevated wiring path
2Reliability
If wiring is formed using conventional methods with dielectric material, then electrical insulation is provided, but the wiring structure causes opposite directional deformation and reduces actuator performance
Solution Approach 1:
The patent moves the wiring to another dimension by forming it in an upper layer above the piezoelectric bodies, separated by an insulating layer. This vertical separation maintains electrical insulation functionality while eliminating the harmful lateral deformation interference, thereby improving bending performance without sacrificing insulation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution prevents the reduction of bending efficiency by eliminating opposite directional deformation of the wiring, thereby maintaining or improving the actuator's bending performance and reducing manufacturing costs.
Implementation Method 1
The first piezoelectric actuator 207 includes a piezoelectric body 215; a part of the common lower electrode 206 which is located below the piezoelectric body 215; and an upper electrode 216 provided on the piezoelectric body 215. When the voltage is applied to the first piezoelectric actuator 207, the piezoelectric body 215 displaces in a first direction
Data Source
AI summary
A piezoelectric actuator including first and second piezoelectric cantilevers is disclosed. Wirings are provided on an upper surface of a support body on which the first and second piezoelectric cantilevers are formed. The wirings are formed of patterned metal films.