Piezoacoustic Resonator Temperature Sensing for Stable Frequency
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Solution Overview
Problem
Piezoacoustic resonator devices face temperature-dependent resonant frequency issues, limiting their accuracy and application scope, particularly in sensors for substance detection, where temperature fluctuations affect measurement precision and sensitivity.
Innovation Solution
Integration of a temperature measuring device, such as a resistance heater layer, within the piezoacoustic resonator element to monitor and control operating temperature, using thin film technology for miniaturization and integration, allowing for effective temperature compensation and enhanced measurement accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If temperature compensation is implemented using existing solutions, then measurement accuracy is improved, but device complexity and material composition restrictions increase
Solution Approach 1:
The patent combines the temperature measuring device and heating facility directly into the piezoacoustic resonator element structure. The measuring element is integrated in the immediate vicinity of the resonator, and the heating facility is formed by at least one electrode, merging multiple functions into a single integrated device rather than adding separate compensation components.
Solution Approach 2:
The resonator element itself provides temperature measurement and control capabilities through integrated sensing and heating functions. The electrodes serve dual purposes as both resonator components and heating elements, allowing the device to self-regulate temperature without external intervention or complex additional systems.
2Measurement precision
If temperature compensation is implemented using existing solutions, then measurement accuracy is improved, but manufacturing flexibility is reduced
Solution Approach 1:
The temperature measuring device and heating facility are manufactured as integral parts of the piezoacoustic resonator element using the same thin-film deposition processes. This merging eliminates the need for separate manufacturing steps and material layers that would restrict manufacturing flexibility.
Solution Approach 2:
The electrodes in the resonator structure serve multiple functions: they act as electrical contacts for the piezoelectric layer, as heating elements for temperature control, and as part of the resonator structure itself. This multi-functionality simplifies manufacturing by using existing components for multiple purposes rather than requiring dedicated specialized components.
3Device complexity
If the resonator operates without temperature control, then device simplicity is maintained, but temperature-induced errors increase
Solution Approach 1:
The integrated temperature measuring device provides real-time temperature information from the immediate vicinity of the resonator element. This feedback enables dynamic adjustment of operating conditions or compensation of temperature effects on the resonant frequency, improving signal accuracy while maintaining relatively simple device architecture.
Solution Approach 2:
The heating facility enables active control of the temperature parameter in the resonator environment. By adjusting the heating power, the system can maintain optimal operating temperature or compensate for temperature drift, thereby reducing temperature-induced errors without requiring complex mechanical or structural modifications.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables precise temperature regulation, improving the accuracy of substance detection and expanding the device's application by controlling sorption conditions, reducing temperature-induced errors and enhancing integration density and miniaturization.
Implementation Method 1
If an electrical alternating field is applied to the piezoelectric layer 300 through the electrodes 100/200, then a conversion of the electrical energy into mechanical energy occurs as a result of the inverse piezoelectric effect.
Implementation Method 2
In order to avoid acoustic losses in the direction of the carrier substrate an acoustic mirror (Bragg reflector) 500 is provided here between the lower electrode 300 and the substrate 400. This acoustic mirror comprises a plurality of layers having widely differing acoustic impedances
Implementation Method 3
a measuring element (37) consisting of a material which can be implemented as a resistance heater
Implementation Method 4
the heating facility is formed by at least one electrode (100, 200), wherein the measuring element (37) consists of a material which can be implemented as a resistance heater
Data Source
AI summary
The invention relates to a device (31) which comprises at least one piezoacoustic resonator element (2) having a piezoelectric layer (32) and two electrodes that are electrically contacted to the piezoelectric layer (32). The piezoacoustic resonator element (2) is configured in such a manner that, when a voltage is applied to the piezoelectric layer (32), a thickness oscillation of the piezoelectric layer (32) is excited via the electrodes with a resonant frequency. The inventive device is characterized by comprising, integrated into the piezoacoustic resonator element (2), a temperature measurement device (3) having a measuring element (37) that is configured as a thin layer.