Piezoelectric Ceramic Actuator With Capacitance Feedback Control

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Solution Overview

Problem

Existing actuators, particularly piezoelectric ceramic actuators, face challenges in achieving precise control and positioning due to the lack of closed-loop control systems. Additionally, integrating actuation and pressure sensing functions in a single device can lead to interference between the two modes of operation.

Innovation Solution

An integrated piezoelectric ceramic actuator and pressure sensor system that includes an actuator controller unit, a capacitance sensing unit, an operation mode status storage unit, and a piezoelectric ceramic unit. This system uses capacitance measurements as feedback for control, allowing for enhanced closed-loop control during actuation and precise pressure sensing when the device is at rest.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If piezoelectric ceramic is used for both actuation and pressure sensing in an integrated device, then cost is reduced and device integration is improved, but interference occurs between actuation and pressure sensing modes

Engineering Contradiction:
Improveintegration of actuation and pressure sensing functionsVSAvoidinterference between actuation and pressure sensing modes
Core Design Contradiction:
Adaptability or versatilityVSObject-affected harmful factors

Solution Approach 1:

The system dynamically switches between actuation mode and pressure sensing mode based on operational requirements. The controller activates the piezoelectric ceramic for actuation when needed, and switches to pressure sensing mode when the actuator is stationary, thereby eliminating interference between the two functions while maintaining integration benefits

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The system employs periodic switching between actuation and pressure sensing operations. During actuation phases, the piezoelectric ceramic generates mechanical motion, and during idle phases, it transitions to pressure sensing mode to detect applied forces, creating a time-division multiplexed operation that prevents mode interference

Inventive Principle:
Principle #19Periodic action

2Measurement precision

If closed-loop control is implemented using back electromotive force or Hall sensors, then rotor position detection is achieved, but these methods are not applicable to piezoelectric ceramic actuators which do not generate back electromotive force or magnetic flux

Engineering Contradiction:
Improverotor position detection accuracyVSAvoidapplicability to piezoelectric ceramic actuators
Core Design Contradiction:
Measurement precisionVSAdaptability or versatility

Solution Approach 1:

The system implements closed-loop control by measuring capacitance between the rotor plate and stator plate, which varies with the position of the piezoelectric ceramic actuator. This capacitance feedback provides real-time position information enabling precise control without requiring back electromotive force or magnetic flux detection mechanisms

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The invention replaces traditional electromagnetic sensing methods (back electromotive force and Hall sensors) with a capacitance-based detection system. This substitution enables position detection in piezoelectric actuators by measuring electrical capacitance changes rather than relying on electromagnetic phenomena absent in piezoelectric materials

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Measurement precision

If capacitance detection is used for rapid and precise rotor position determination, then control precision is improved, but device complexity increases due to additional sensing components

Engineering Contradiction:
Improverotor position determination precisionVSAvoidcomplexity of capacitance detection and measuring component
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The piezoelectric ceramic structure serves dual functions: it acts as both the actuator element and the capacitor for position detection. The existing rotor plate and stator plate form the capacitor plates, eliminating the need for separate sensing components and reducing overall device complexity while maintaining high measurement precision

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The piezoelectric actuator structure itself provides the capacitance sensing function without requiring external or additional components. The movable rotor plate and fixed stator plate naturally form a variable capacitor whose capacitance changes with position, allowing the actuator to sense its own position through its inherent structural elements

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system achieves precise and efficient control of the actuator by using capacitance feedback for closed-loop control, while minimizing interference between actuation and pressure sensing modes, thus ensuring consistent and accurate operation.

Implementation Method 1

An electrical actuator is a device that converts electrical energy into mechanical motion

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

measuring, at a capacitance sensing unit of the control system, capacitance between a rotor plate attached to a rotor and a stator plate attached to a stator

Methodology Applied
Scientific EffectCapacitance: Capacitance

Data Source

PatentUS20250105762A1Piezoelectric ceramic actuator and control methods
Publication Date: 2025.03.27 CHIPSEMI SEMICON (NINGBO) CO LTD
  • US20250105762A1 patent drawing
  • US20250105762A1 patent drawing
  • US20250105762A1 patent drawing

AI summary

Embodiments provide an integrated actuator and pressure sensor with closed-loop feedback of capacitance, resulting in improved actuation performance and cost-effective form factor. The disclosed integrated piezoelectric ceramic actuator comprises a capacitance sensing unit, and a piezoelectric ceramic. It operates in either actuation mode or pressure sensing mode. During the actuation operation mode, the integrated actuator generates a first control signal based on the capacitance measured at the capacitance sensing unit. During the pressure sensing operation mode, the working parameters corresponding to pressure applied to the piezoelectric ceramic are determined based on the measured capacitances.