Piezoelectric Actuator Electrode Conduction via Vertical Extension
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Solution Overview
Problem
Existing piezoelectric actuators face challenges in ensuring reliable electrode conduction without increasing the size of the device, particularly due to issues with etching processes that can lead to disconnected electrodes.
Innovation Solution
The design incorporates a configuration with a vibration plate, first and second piezoelectric bodies, and electrodes arranged in a specific pattern to allow for reliable conduction through intermediate and trace portions, which are drawn out in a direction orthogonal to the thickness direction, preventing disconnection and maintaining a compact size.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the exposed portion of each individual electrode is made relatively large in size to ensure reliable conduction, then the conduction reliability is improved, but the piezoelectric element becomes large
Solution Approach 1:
The patent extends the individual electrodes in the thickness direction (vertical dimension) to form exposed portions, rather than increasing their area in the horizontal plane. This dimensional transition allows reliable conduction while maintaining a compact overall device size, directly resolving the contradiction between conduction reliability and device size.
2Ease of manufacture
If etching is performed to form individual electrodes and exposed portions, then the electrode structure is created, but over-etching may remove part of the individual electrode causing disconnection
Solution Approach 1:
The patent designs the individual electrodes with sufficient thickness and extends them to form exposed portions before the etching process. This preliminary structural preparation creates a buffer that protects against over-etching damage, ensuring that even if etching extends beyond the intended boundary, the electrode conduction remains intact.
3Reliability
If the individual electrodes are made larger to compensate for etching unevenness, then the conduction reliability is improved, but the piezoelectric element size increases
Solution Approach 1:
Instead of compensating for etching precision issues by increasing the horizontal area of individual electrodes, the patent compensates by increasing the thickness (vertical dimension) of the electrodes and extending them to form exposed portions. This approach maintains manufacturing precision requirements while ensuring conduction reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration ensures reliable conduction between electrodes while maintaining a compact size, enhancing the deformation and pressure application capabilities of the piezoelectric actuator.
Implementation Method 1
portions of the first piezoelectric layers interposed between the first common electrode and the individual electrodes are active portions that are deformed piezoelectrically due to the difference in electric potential between the individual electrodes and the first common electrode
Data Source
AI summary
There is provided a piezoelectric actuator, including: a vibration plate; a first piezoelectric body; a second piezoelectric body; a first electrode disposed on a first surface of the first piezoelectric body; a second electrode disposed on a second surface of the second piezoelectric body; an intermediate electrode disposed on an intermediate surface of the first piezoelectric body and overlapping with the first and second electrodes; an intermediate trace connected to the intermediate electrode on the intermediate surface and drawn out to one side in a first direction beyond the first piezoelectric body and the second piezoelectric body; a first trace overlapping with the intermediate trace in the thickness direction and being conducted with the intermediate trace; and a second trace overlapping with the intermediate trace in the thickness direction and being conducted with the intermediate trace.