Piezoelectric Material Desorption for Higher-Frequency Resonators
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Solution Overview
Problem
Conventional piezoelectric resonators face limitations due to trade-offs between resonant frequency and quality factor, and mechanical stability, where increasing resonant frequency often results in reduced mechanical stability and quality factor.
Innovation Solution
Reducing the hydrogen content in the piezoelectric material increases the shear wave velocity, thereby enhancing both the resonant frequency and quality factor without compromising mechanical stability, achieved through a thermal desorption process that removes hydrogen from the material.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If the thickness of the quartz crystal plate is reduced to increase resonant frequency, then resonant frequency is improved, but mechanical stability deteriorates
Solution Approach 1:
The patent changes the physical-chemical parameters of the piezoelectric material by reducing hydrogen content through thermal desorption. This parameter change increases shear wave velocity, which directly increases resonant frequency without requiring thickness reduction, thereby maintaining mechanical stability while achieving higher frequency operation.
2Speed
If the thickness of the quartz crystal plate is reduced to increase resonant frequency, then resonant frequency is improved, but quality factor deteriorates
Solution Approach 1:
The patent applies parameter changes by reducing hydrogen content in the piezoelectric material through thermal desorption. This increases shear wave velocity and resonant frequency while simultaneously improving quality factor by reducing energy loss mechanisms associated with hydrogen presence, thus resolving the trade-off between frequency and Q factor.
3Speed
If hydrogen content is reduced to increase shear wave velocity, then resonant frequency is improved, but manufacturing complexity increases
Solution Approach 1:
The patent applies preliminary action by performing thermal desorption during the manufacturing process to reduce hydrogen content before the resonator is assembled and deployed. This preliminary removal of hydrogen achieves the desired increase in shear wave velocity and resonant frequency while incorporating the treatment into the existing manufacturing workflow, minimizing additional complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach improves the sensitivity and frequency stability of mass-sensitive sensors and oscillator circuits by increasing resonant frequency by up to 50% and quality factor by up to 10% without requiring a reduction in thickness, maintaining mechanical stability and performance over time.
Implementation Method 1
achieved through a thermal desorption process that removes hydrogen from the material
Implementation Method 2
A piezoelectric resonator comprising a piezoelectric material
Data Source
AI summary
The present disclosure relates to piezoelectric resonator, a piezoelectric material for a piezoelectric resonator, and a method for manufacturing a piezoelectric resonator. In particular, it relates to piezoelectric resonator comprising a piezoelectric material, where the piezoelectric material is configured to have an improved shear wave velocity.