Piezoelectric Device Hydrogen-Blocking Layer for Reliable Fabrication

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Solution Overview

Problem

Hydrogen-ion contamination during the manufacturing process degrades the reliability of piezoelectric devices, affecting their performance.

Innovation Solution

Incorporation of a multilayer hydrogen blocking layer to prevent hydrogen ions from penetrating into the piezoelectric layer by forming a metal-insulator-metal element and covering it with a passivation layer, ensuring minimal hydrogen-ion inclusion.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional manufacturing process is used, then manufacturing simplicity is maintained, but hydrogen-ion contamination occurs degrading device reliability

Engineering Contradiction:

Improvedevice reliabilityVSAvoidmanufacturing process complexity

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

A hydrogen blocking layer is formed on the substrate before depositing the piezoelectric layer. This preliminary protective action prevents hydrogen-ion contamination during subsequent manufacturing steps, ensuring device reliability without requiring complex post-processing procedures.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The hydrogen blocking layer acts as an intermediary barrier between the substrate and the piezoelectric layer. It specifically blocks hydrogen ions while allowing the manufacturing process to continue, thus protecting the piezoelectric material from contamination without complicating the overall fabrication process.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Reliability

If hydrogen blocking layer is added, then hydrogen-ion contamination is prevented improving reliability, but manufacturing process becomes more complex

Engineering Contradiction:

Improvepiezoelectric device reliabilityVSAvoidmanufacturing ease

Core Design Contradiction:

ReliabilityVSEase of manufacture

Solution Approach 1:

The hydrogen blocking layer is incorporated as an initial step in the manufacturing sequence. By performing this protective action at the beginning, the layer prevents hydrogen-ion contamination throughout the entire fabrication process, improving reliability while adding only one straightforward step to the manufacturing flow.

Inventive Principle:

Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enhances the reliability of piezoelectric devices by maintaining the integrity of the piezoelectric characteristics and preventing hydrogen-ion ingress, thereby improving device performance.

Implementation Method 1

When a voltage is applied, the electrical field generated by the applied voltage will cause the piezoelectric layer to stretch or compress in a direction normal to the piezoelectric layer

Methodology Applied

Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS12389799B2Piezoelectric device and method of forming the same

Publication Date: 2025.08.12 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD

AI summary

A piezoelectric device including a substrate, a metal-insulator-metal element, a hydrogen blocking layer, a passivation layer, a first contact terminal and a second contact terminal is provided. The metal-insulator-metal element is disposed on the substrate. The hydrogen blocking layer is disposed on the metal-insulator-metal element. The passivation layer covers the hydrogen blocking layer and the metal-insulator-metal element. The first contact terminal is electrically connected to the metal-insulator-metal element. The second contact terminal is electrically connected to the metal-insulator-metal element.