Electric Field Sensor Using Piezoelectric Electrode Vibration
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing electric field sensors face challenges with high power consumption and large volume in traditional mechanical designs, and require high driving voltage in miniature forms, limiting their efficiency and practicality for various applications.
Innovation Solution
An electric field sensor utilizing electrode interleaving vibration, where a piezoelectric bar or thermal actuators drive the shielding electrode to vibrate within a substrate hole, inducing charge variations on a sensing electrode to generate an AC output signal for measuring external electric field intensity, fabricated using MEMS technology for compact and low-power operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional mechanical technology is used for electric field sensors, then measurement precision is improved, but volume and power consumption increase
Solution Approach 1:
The patent replaces traditional mechanical sensing mechanisms with a piezoelectric actuation system. The piezoelectric bar converts electrical energy directly into mechanical vibration of the shielding electrode, eliminating the need for complex mechanical moving parts while maintaining measurement precision and reducing power consumption.
Solution Approach 2:
The patent utilizes mechanical vibration of the shielding electrode driven by the piezoelectric bar. The vibrating shielding electrode modulates the electric field interaction with the sensing electrode, enabling precise measurement of external electric fields with low power consumption through resonant vibration at optimized frequencies.
2Volume of moving object
If miniature electric field sensors using laterally electrostatic comb-drive are used, then volume is reduced, but driving voltage requirement increases
Solution Approach 1:
The patent replaces the electrostatic comb-drive mechanism with a piezoelectric actuation system. The piezoelectric bar directly converts low-voltage electrical signals into mechanical displacement of the shielding electrode, eliminating the need for high driving voltages while maintaining the miniature form factor.
Solution Approach 2:
The patent changes the actuation mechanism from electrostatic (requiring high voltage) to piezoelectric (operating at low voltage). This parameter change in the driving mechanism allows the sensor to maintain its compact size while operating at IC-compatible voltages, resolving the contradiction between miniaturization and driving voltage requirements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances signal output and reduces power consumption by achieving large displacement under low driving voltage, enabling precise and efficient electric field measurements with compact sensor designs compatible with IC voltages.
Implementation Method 1
a piezoelectric bar having one end connected to the center of the shielding electrode, the other end fixed on the substrate
Implementation Method 2
inducing charge variations on a sensing electrode to generate an AC output signal for measuring external electric field intensity
Data Source
AI summary
An electric field sensor comprising: a substrate having a hole; a shielding electrode and a sensing electrode, disposed in the hole of the substrate; a piezoelectric bar having one end connected to the center of the shielding electrode, the other end fixed on the substrate. Present invention provides several electric field sensors, which have the same feature of utilizing electrodes interleaving vibration to modulate external electric field. They have IC-compatible operation voltage and small volume.