Piezoelectric Balance and Ellipsometer for Nanofiber Electrode Thickness

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Solution Overview

Problem

Existing systems fail to simultaneously determine uncorrelated thickness and optical constants of samples, particularly when working electrodes with nanofibers are used, and they lack the ability to investigate cyclical applied voltage effects during electrochemical processing, which affects repeatability, especially when dealing with biological samples.

Innovation Solution

A system combining a piezoelectric balance with a multiplicity of nanofibers on the working electrode and an ellipsometer, allowing for simultaneous determination of effective thickness and optical constants by applying electrical energy and analyzing electromagnetic radiation data, while enabling investigation of electrochemical reactions and anisotropic properties through off-axis Jones or Mueller Matricies.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a Piezoelectric Balance is used to monitor mass change and determine effective thickness, then thickness measurement is achieved, but optical constants cannot be determined independently (they remain correlated with thickness)

Engineering Contradiction:
Improvethickness measurementVSAvoidoptical constants correlation
Core Design Contradiction:
Measurement precisionVSLoss of information

Solution Approach 1:

The patent combines a Piezoelectric Balance (for mass/thickness monitoring) with an Ellipsometer system (for optical property measurement) into a single integrated system. This merging allows simultaneous measurement of both effective thickness via piezoelectric frequency shifts and optical constants via ellipsometric parameters, thereby decoupling the previously correlated parameters and enabling independent determination of both thickness and optical properties.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The integrated system performs multiple functions simultaneously: it monitors mass change via piezoelectric balance, determines effective thickness, measures optical constants, and characterizes anisotropic properties. This multi-functionality resolves the limitation of single-function systems by providing comprehensive material characterization in one setup.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Productivity

If conventional electrochemical processing is performed, then material deposition or etching occurs, but repeatability is poor especially with biological samples

Engineering Contradiction:
Improvematerial processing rateVSAvoidexperimental repeatability
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The system implements real-time feedback by continuously monitoring both mass change (via piezoelectric balance) and optical property changes (via ellipsometer) during electrochemical processing. This dual-parameter feedback allows for precise control and optimization of deposition or etching processes, ensuring repeatable results by maintaining consistent process conditions and enabling immediate detection of deviations.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent utilizes changes in multiple parameters (mass, thickness, optical constants, anisotropic properties) to comprehensively characterize the electrochemical process. By monitoring how these parameters evolve simultaneously, the system can optimize processing conditions and achieve better repeatability compared to single-parameter monitoring.

Inventive Principle:
Principle #35Parameter changes

3Adaptability or versatility

If working electrodes with nanofibers are used, then anisotropic properties can be investigated, but the system complexity increases

Engineering Contradiction:
Improveanisotropic property characterizationVSAvoidelectrode structure
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The integrated Piezoelectric Balance-Ellipsometer system is designed to handle both isotropic and anisotropic samples universally. The ellipsometer component can detect anisotropic properties through off-diagonal elements in the Mueller matrix, while the piezoelectric balance provides mass/thickness information. This universal design allows the same system to characterize diverse sample types without requiring separate specialized equipment.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables precise, repeatable determination of sample thickness and optical constants, decoupling them from electrochemical reaction-driven changes, thereby improving data reliability and capturing anisotropic properties, especially useful for biological samples.

Implementation Method 1

a Piezoelectric Balance system with simultaneous application of an Ellipsometer system

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

changes in the vibrational frequence of the Piezoelectric Balance system, and said frequency changes can be interpreted to describe said working electrode mass change

Methodology Applied
Scientific EffectVibrational frequency-mass relationship: Resonance

Implementation Method 3

a source of electromagnetic radiation which is oriented to simultaneously direct a beam of electromagnetic radiation therefrom at the surface of said working electrode, interact therewith and enter a detector of electromagnetic radiation

Methodology Applied
Scientific EffectEllipsometry: Polarisation

Implementation Method 4

when electrical energy is applied between said working electrode and said counter electrode an electrochemical reaction occurs at the working electrode, thereby causing a change in the vibrational frequency

Methodology Applied
Scientific EffectElectrochemical reaction: Electrolysis

Data Source

PatentUS10048059B1Combined use of oscillating means and ellipsometry to determine uncorrelated effective thickness and optical constants of material deposited at or etched from a working electrode that preferrably comprises non-normal oriented nanofibers
Publication Date: 2018.08.14 J A WOOLLAM CO
  • US10048059B1 patent drawing
  • US10048059B1 patent drawing
  • US10048059B1 patent drawing

AI summary

Disclosed are systems and methods that enable determination of uncorrelated thickness of a working electrode and surface region optical constants in settings involving electrochemical processing at a working electrodes in a Piezoelectric Balance system, by simultaneous application of an Ellipsometer system, the working electrode optionally having a multiplicity of nanofibers that are oriented non-normally to a surface of said working electrode. Further disclosed is, simultaneous with said determinations, the monitoring of electrochemical processes at a piezoelectric balance working electrode driven by electrical energy applied between said working electrode and counter electrode.