Piezoelectric Fluid Control Device With Deformable Substrate
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Solution Overview
Problem
Conventional fluid control devices with rigid flat-plate structures face challenges in precisely aligning components, leading to assembling errors, reduced fluid transportation efficiency, and noise generation, especially as they are miniaturized.
Innovation Solution
A fluid control device with a deformable substrate and piezoelectric actuator, where the deformable substrate forms a synchronously-deformed structure with a flexible plate and communication plate, allowing for precise maintenance of a specified gap between the flexible plate and the vibration plate of the piezoelectric actuator, reducing assembling errors and noise.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If rigid flat-plate structures are used for substrate and piezoelectric actuator, then structural strength is maintained, but assembling precision and gap consistency deteriorate
Solution Approach 1:
The substrate is designed with a deformable region that can dynamically adjust its shape during assembly and operation. This deformable region includes a through-hole that allows the substrate to flex and conform to the piezoelectric actuator, enabling precise gap control while maintaining overall structural strength in the rigid regions.
Solution Approach 2:
The substrate incorporates a thin deformable region with a through-hole that acts as a flexible element. This thin film structure can bend and deform to achieve precise alignment with the piezoelectric actuator, solving the gap consistency issue while the surrounding rigid regions maintain structural strength.
2Volume of moving object
If miniaturized components are adopted, then device size is reduced, but alignment difficulty and assembling error increase
Solution Approach 1:
The deformable substrate with through-hole provides dynamic adjustment capability that compensates for alignment errors in miniaturized components. The flexible region can deform to accommodate slight misalignments, ensuring precise gap control even when assembling small-scale components.
Solution Approach 2:
The substrate's physical state is changed from completely rigid to partially deformable by introducing the through-hole in the deformable region. This parameter change allows the substrate to adapt its shape, compensating for alignment difficulties in miniaturized devices.
3Productivity
If gap depth is increased, then fluid transportation efficiency is improved, but device height and complexity increase
Solution Approach 1:
The deformable substrate dynamically adjusts the gap depth between itself and the piezoelectric actuator. During operation, the deformable region can flex to optimize the gap depth for fluid transportation efficiency, achieving high productivity without requiring a permanently large device height.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances fluid transfer efficiency and reduces noise by maintaining a consistent gap, improving the overall performance of the fluid control device, especially in miniaturized forms.
Implementation Method 1
The piezoelectric element is subjected to deformation in response to an applied voltage. The vibration plate is subjected to a curvy vibration in response to the deformation of the piezoelectric element.
Implementation Method 2
The deformable substrate includes a flexible plate and a communication plate. The flexible plate is stacked and coupled with the communication plate and then the deformable substrate is subjected to synchronous deformation. Consequently, a synchronously-deformed structure is formed on and defined by the flexible plate and the communication plate collaboratively.
Data Source
AI summary
A fluid control device includes a piezoelectric actuator and a deformable substrate. The piezoelectric actuator includes a piezoelectric element and a vibration plate. The piezoelectric element is attached on a first surface of the vibration plate and is subjected to deformation in response to an applied voltage. The vibration plate is subjected to a curvy vibration in response to the deformation of the piezoelectric element. A bulge is formed on a second surface of the vibration plate. The deformable substrate includes a flexible plate and a communication plate stacked on each other. A synchronously-deformed structure is defined by the flexible plate and the communication plate. The deformable substrate is bent in the direction toward the vibration plate. There is a specified depth maintained between the flexible plate and the bulge of the vibration plate. The flexible plate includes a movable part corresponding to the bulge of the vibration plate.