Piezoelectric Vibrator Wafer Guide Part Cracking Stability
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Solution Overview
Problem
The miniaturization of piezoelectric vibrator elements leads to variability in the cracking of connection parts during breaking, resulting in unstable landing postures and reduced yield ratios due to inconsistent suction support and conveyance.
Innovation Solution
Incorporating a guide part with a tilted surface or triangular shape in the connection part to stabilize the cracking process by guiding force applied in the thickness direction to the width direction, ensuring a vertex angle between 30 to 120 degrees and positioning guide parts on both side surfaces of the main body part.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If piezoelectric vibrator elements are miniaturized, then the size of the piezoelectric vibrator element is reduced, but the landing posture becomes unstable and yield ratio decreases
Solution Approach 1:
The guide part is formed in advance on the connection part before breaking off the piezoelectric vibrator element. This guide part preliminarily determines the cracking path and guides the force application, ensuring that even miniaturized elements break off with consistent landing postures. The guide part acts as a pre-prepared structure that controls the breaking process beforehand.
Solution Approach 2:
The guide part changes the geometric parameters of the connection part by introducing specific structural features (such as grooves or protrusions) that modify how force is distributed during breaking. This parameter change in the connection part's structure ensures stable cracking behavior regardless of the miniaturized size of the piezoelectric vibrator element.
2Volume of moving object
If piezoelectric vibrator elements are miniaturized, then the size of the piezoelectric vibrator element is reduced, but the cracking way of connection part varies and manufacturing consistency deteriorates
Solution Approach 1:
The guide part is formed in advance on the connection part before breaking off the piezoelectric vibrator element. This guide part preliminarily determines the cracking path and guides the force application, ensuring that even miniaturized elements break off with consistent landing postures. The guide part acts as a pre-prepared structure that controls the breaking process beforehand.
Solution Approach 2:
The guide part changes the geometric parameters of the connection part by introducing specific structural features (such as grooves or protrusions) that modify how force is distributed during breaking. This parameter change in the connection part's structure ensures stable cracking behavior regardless of the miniaturized size of the piezoelectric vibrator element.
3Device complexity
If the connection part is broken off without a guide part, then the structure is simple, but the breaking process is unstable and yield ratio decreases
Solution Approach 1:
The guide part is formed in advance on the connection part before breaking off the piezoelectric vibrator element. This guide part preliminarily determines the cracking path and guides the force application, ensuring that even miniaturized elements break off with consistent landing postures. The guide part acts as a pre-prepared structure that controls the breaking process beforehand.
Data Source
AI summary
There is provided a wafer making it possible to stably break off the piezoelectric vibrator element. The wafer includes a piezoelectric vibrator element, a frame part, and a connection part adapted to connect the piezoelectric vibrator element and the frame part to each other, and the connection part is provided with a guide part adapted to guide force, which is applied to the connection part from one surface side in the thickness direction of the connection part when breaking off the piezoelectric vibrator element from the frame part at the connection part, to at least one side in the width direction of the connection part.