Piezoelectric Layer Spacing Structure for Thinner Resonators
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Solution Overview
Problem
Existing piezoelectric devices suffer from increased thickness due to variable distance between piezoelectric layers during manufacturing, which can be attributed to the use of a frame-shaped connecting layer made of metal, leading to inconsistent spacing.
Innovation Solution
The implementation of an intermediate layer between piezoelectric layers with strategically placed space portions and through holes, allowing precise control over the distance between layers, thereby reducing the overall thickness of the device.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a frame-shaped connecting layer made of metal is used to connect substrates, then the substrates can be connected structurally, but the distance between piezoelectric layers becomes variable during manufacturing, requiring increased substrate distance and leading to increased device thickness
Solution Approach 1:
The patent introduces an intermediate layer as a mediator between the first and second piezoelectric layers. This intermediate layer includes space portions that precisely define and maintain a fixed distance between the piezoelectric layers, eliminating the variability caused by frame-shaped connecting layers while preventing direct contact between the piezoelectric layers.
2Productivity
If the distance between piezoelectric layers is increased to accommodate manufacturing variability, then manufacturing flexibility is improved, but the overall device thickness increases
Solution Approach 1:
The patent changes the structural parameter of the intermediate layer to include space portions with precisely controlled dimensions. This allows the distance between piezoelectric layers to be fixed at an optimal value that minimizes device thickness while still accommodating manufacturing tolerances through the designed space portions.
3Reliability
If substrates are connected by metal connecting layers, then electrical connection is achieved, but moisture and dust ingress pathways are created, reducing device reliability
Solution Approach 1:
The intermediate layer acts as an intermediary barrier between the piezoelectric layers, preventing direct contact and creating a sealed structure with space portions that eliminate pathways for moisture and dust ingress, thereby improving device reliability.
Solution Approach 2:
The space portions in the intermediate layer create an isolated, protected environment between the piezoelectric layers, effectively creating an inert barrier that prevents harmful external factors such as moisture and dust from reaching the sensitive piezoelectric components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration results in a piezoelectric device with a reduced thickness and improved reliability by preventing moisture and dust ingress, while enhancing frequency and resonance characteristics.
Implementation Method 1
a first piezoelectric layer with a thickness in a first direction, the first piezoelectric layer including an upper surface being one surface of the first piezoelectric layer in the first direction, and a lower surface being another surface of the first piezoelectric layer in the first direction
Data Source
AI summary
A piezoelectric device includes a first piezoelectric layer including upper and lower surfaces, a first support on a lower surface side of the first piezoelectric layer, first upper and lower electrodes respectively on the upper and lower surfaces of the first piezoelectric layer at least partially facing each other, a second piezoelectric layer including upper and lower surfaces, a second support on a lower surface side of the second piezoelectric layer, and second upper and lower electrodes respectively on the upper and lower surfaces of the second piezoelectric layer at least partially facing the second upper electrode, and an intermediate layer. The upper surfaces of the first and second piezoelectric layers face each other in a first direction, and the intermediate layer is located between the upper surfaces of the first and second piezoelectric layers.


