Piezoelectric Vibration Structure for Low-Frequency Pressure Detection
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Solution Overview
Problem
Existing piezoelectric elements face challenges in improving detection accuracy, particularly on the low-frequency side, due to limitations in their design and functionality.
Innovation Solution
A piezoelectric element is designed with a vibrating portion that includes a support member and multiple vibration regions, where one end portion is supported and the other end portion is floating, with mass distribution configured to enhance detection accuracy by separating pressure and acceleration detection sections, allowing for improved signal processing based on frequency thresholds.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a single vibration region is used in the piezoelectric element, then the device complexity is reduced, but the detection accuracy particularly on the low-frequency side deteriorates
Solution Approach 1:
The vibration region is divided into multiple sub-regions (first vibration region and second vibration region) with different mass distributions. The first vibration region has heavier mass on the support member side for pressure detection, while the second vibration region has heavier mass on the floating side for acceleration detection. This segmentation enables multi-frequency detection capabilities without requiring entirely separate sensing elements.
Solution Approach 2:
Different local regions of the vibration structure are given different mass characteristics. By adjusting the mass distribution locally in each vibration region, the patent creates specialized detection zones optimized for different detection purposes (pressure vs. acceleration) while maintaining a unified overall structure.
2Measurement precision
If separate pressure and acceleration detection sections are implemented, then the detection accuracy is improved, but the manufacturing process becomes more complex
Solution Approach 1:
The patent combines pressure detection and acceleration detection functions into a single integrated vibration structure. Both detection sections share the same support member and piezoelectric film, allowing simultaneous fabrication of multiple sensing functions through a unified manufacturing process rather than requiring separate assembly of independent sensors.
Solution Approach 2:
The single vibration structure serves multiple detection functions by incorporating both pressure detection capability (through the first vibration region) and acceleration detection capability (through the second vibration region). This multi-functional design eliminates the need for separate pressure and acceleration sensors while maintaining detection accuracy for both parameters.
3Manufacturing precision
If the vibration region has uniform mass distribution, then the manufacturing precision is easier to maintain, but the detection accuracy on the low-frequency side deteriorates
Solution Approach 1:
The patent deliberately introduces asymmetric mass distributions in different vibration regions. The first vibration region has asymmetric mass distribution with heavier mass on the support member side, while the second vibration region has asymmetric distribution with heavier mass on the floating side. This controlled asymmetry optimizes detection characteristics for different frequency ranges while remaining compatible with standard manufacturing processes.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances detection accuracy on the low-frequency side by utilizing separate detection sections with different mass distributions, improving the overall detection precision and simplifying the manufacturing process.
Implementation Method 1
a vibration region in which a mass on the one end portion side is heavier than the mass on the other end portion side, and which serves as a pressure detection section configured to output a first detection signal based on the charge of the piezoelectric film, and a vibration region in which a mass on the other end portion side is heavier than the mass on one end portion side, and which serves as an acceleration detection section configured to output a second detection signal based on the charge of the piezoelectric film
Data Source
AI summary
A piezoelectric element includes a support member and a vibrating portion. The vibrating portion has a support region supported by the support member, and a plurality of vibration regions, one end portion side of which is supported by the support region, and the other end portion side of which is opposite to the one end portion is floating from the support member. A first vibration region in which a mass on the one end portion side is heavier than the mass on the other end portion side serves as a pressure detection section outputting a first detection signal based on the charge of the piezoelectric film. A second vibration region in which a mass on the other end portion side is heavier than the mass on one end portion side serves as an acceleration detection section outputting a second detection signal based on the charge of the piezoelectric film.