Piezoelectric Membrane Columnar Amorphous Inkjet Head

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Solution Overview

Problem

Existing piezoelectric membranes in inkjet heads face challenges in achieving optimal orientation and breakdown voltage, affecting their performance and reliability.

Innovation Solution

A piezoelectric membrane with a columnar structure layer and an amorphous structure layer made of the same piezoelectric material, where the amorphous layer is stacked contiguously with the columnar layer, enhancing both orientation and breakdown voltage properties.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a piezoelectric membrane is formed with uniform film thickness using conventional methods (sol-gel or sputtering), then the manufacturing process is simple, but the orientation and breakdown voltage are insufficient

Engineering Contradiction:
Improvebreakdown voltageVSAvoidmembrane structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The piezoelectric membrane is divided into multiple layers: a first piezoelectric membrane layer with columnar structure and a second piezoelectric membrane layer with amorphous structure. This segmentation allows each layer to contribute different properties - the columnar layer provides orientation while the amorphous layer enhances breakdown voltage, resolving the contradiction between reliability and structural complexity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention uses a composite structure combining columnar and amorphous piezoelectric material layers. This composite approach leverages the advantages of both structures - the directional properties of columnar crystals and the high breakdown voltage of amorphous materials - to achieve superior overall performance without requiring complete structural redesign.

Inventive Principle:
Principle #40Composite materials

2Manufacturing precision

If a piezoelectric membrane with improved orientation is formed, then the displacement characteristics improve, but the breakdown voltage may be compromised

Engineering Contradiction:
ImproveorientationVSAvoidbreakdown voltage
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

By separating the membrane into distinct columnar and amorphous layers, the invention assigns orientation optimization to the columnar layer and breakdown voltage optimization to the amorphous layer. This segmentation eliminates the trade-off by allowing independent optimization of each property in its dedicated layer.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the piezoelectric membrane are given different structures tailored to local requirements - the columnar layer where orientation is critical for displacement, and the amorphous layer where high breakdown voltage is critical for reliability. This local quality approach resolves the contradiction by matching structure to function in each region.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration results in improved displacement and electromotive force characteristics, leading to enhanced driving performance and controllability of the inkjet head.

Implementation Method 1

When a driving voltage is applied between the upper and lower electrodes, the piezoelectric membrane is deformed by the inverse piezoelectric effect

Methodology Applied
Scientific EffectInverse piezoelectric effect: Piezoelectric Effect

Implementation Method 2

the piezoelectric membrane that is deformed by the inverse piezoelectric effect

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS9427967B2Piezoelectric membrane, piezoelectric device, and inkjet head
Publication Date: 2016.08.30 ROHM CO LTD
  • US9427967B2 patent drawing
  • US9427967B2 patent drawing
  • US9427967B2 patent drawing

AI summary

An inkjet head includes a substrate that defines a cavity in which ink is stored, a vibrating membrane that is supported by the substrate and that defines the cavity, and a piezoelectric device that is disposed on the vibrating membrane and that changes a volume of the cavity by displacing the vibrating membrane. The piezoelectric device includes a lower electrode, a piezoelectric membrane that is disposed on the lower electrode, and an upper electrode that is disposed on the piezoelectric membrane and that faces the lower electrode with the piezoelectric membrane interposed between the upper electrode and the lower electrode. The piezoelectric membrane includes a columnar structure layer and an amorphous structure layer of a piezoelectric material. The amorphous structure layer is stacked contiguously with the columnar structure layer.