Piezoelectric Membrane Transducer Arrays with Patterned Insulation

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Solution Overview

Problem

Acoustic crosstalk between piezoelectric vibrating membranes in arrays for acoustic/ultrasound applications leads to reduced image quality, poorly defined measurement areas, and larger than expected focus due to lateral vibrations, which existing technologies have not adequately addressed.

Innovation Solution

A patterned stack on a flexible substrate with a piezoelectric layer sandwiched between electrode layers and a patterned insulation layer that electrically and acoustically insulates between transducers, preventing lateral crosstalk by varying flexural rigidity between contact and insulated areas.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If piezoelectric membranes are closely packed in arrays for acoustic applications, then device productivity and area utilization are improved, but acoustic crosstalk between neighboring transducers increases due to lateral vibrations

Engineering Contradiction:
Improvetransducer array densityVSAvoidacoustic crosstalk
Core Design Contradiction:
ProductivityVSObject-generated harmful factors

Solution Approach 1:

The piezoelectric membrane is segmented into isolated vibrating regions by providing insulating material between adjacent membranes. This segmentation prevents lateral vibrations from propagating between neighboring transducers, thereby reducing acoustic crosstalk while maintaining high array density for improved productivity

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The insulating material is applied locally between specific adjacent membranes rather than uniformly across the entire array. This local quality approach selectively prevents acoustic crosstalk at critical interfaces while maintaining the overall structural integrity and high density of the transducer array

Inventive Principle:
Principle #3Local quality

2Object-generated harmful factors

If insulation material is added between electrodes and piezoelectric layer, then acoustic crosstalk is reduced, but device complexity and manufacturing steps increase

Engineering Contradiction:
Improveacoustic crosstalkVSAvoidmanufacturing process complexity
Core Design Contradiction:
Object-generated harmful factorsVSDevice complexity

Solution Approach 1:

The insulating material serves multiple functions simultaneously: it provides electrical insulation between the electrode and piezoelectric layer, acts as acoustic isolation between adjacent membranes, and defines the boundaries of individual vibrating regions. This multi-functionality reduces the need for separate components, thereby limiting the increase in device complexity despite adding the insulation layer

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Object-generated harmful factors

If insulation material is used to prevent lateral vibrations, then acoustic crosstalk is alleviated, but manufacturing precision requirements increase for pattern formation

Engineering Contradiction:
Improveacoustic crosstalkVSAvoidinsulation pattern precision
Core Design Contradiction:
Object-generated harmful factorsVSManufacturing precision

Solution Approach 1:

The insulating material is applied in advance during the manufacturing process, before final assembly and testing. This preliminary action allows for controlled pattern formation using standard lithographic or deposition techniques, reducing the need for high-precision post-processing and thereby limiting the increase in manufacturing precision requirements

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration effectively alleviates in-plane acoustic crosstalk, allowing for improved manufacturability and design freedom of acoustic devices with minimal crosstalk, maintaining membrane dimensions and resonance frequency while reducing interference between transducers.

Implementation Method 1

piezoelectric layer sandwiched between respective bottom and top electrode layers

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

the insulation material may function as acoustic insulation between the transducers. In this way, acoustic interference or crosstalk can be alleviated

Methodology Applied
Scientific EffectAcoustic insulation: Acoustic Absorption

Data Source

PatentEP3962665B1Acoustic piezoelectric membrane transducer arrays with localized membrane vibrations
Publication Date: 2024.10.09 NEDERLANDSE ORG VOOR TOEGEPAST NATUURWETENSCHAPPELIJK ONDERZOEK TNO
  • EP3962665B1 patent drawingFigure 1A~1B
  • EP3962665B1 patent drawingFigure 2A~2B
  • EP3962665B1 patent drawingFigure 3A~3D

AI summary

An acoustic device (100) comprises an array of acoustic transducers (10a,10b) formed by a patterned stack (12-15) on a flexible substrate (11). The stack comprises a piezoelectric layer (13) sandwiched between respective bottom and top electrode layers (12,15), and a patterned insulation layer (14) formed by a pattern of insulation material (14m). The pattern comprises insulated areas (A14) where the insulation material (14m) is disposed between one of the electrodes (12,15) and the piezoelectric layer (13), and contact areas (A10) without the insulation material (14m) where both electrodes (12,15) contact the piezoelectric layer (13).