Piezoelectric Micro Fluid Actuator With Parallel Channels for Higher Flow
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional fluid transportation devices face challenges in maximizing flow rate and efficiency, particularly in miniaturized applications such as micro pumps, print heads, and industrial printing devices, where innovative structures are needed to enhance fluid transportation capabilities.
Innovation Solution
A micro fluid actuator is developed using surface micromachining and bulk micromachining micro-electromechanical processes, incorporating a substrate, chamber layer, vibration layer, piezoelectric actuation layer, and an aperture array plate, which utilizes different phase charges to drive the vibration layer reciprocally, enabling fluid transportation through a series of apertures and channels while preventing backflow with a one-way valve mechanism.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If conventional fluid transportation devices are miniaturized, then device size is reduced, but flow rate capability deteriorates
Solution Approach 1:
The device is segmented into multiple parallel fluid channels (first fluid channels and second fluid channels) within the vibration layer, allowing simultaneous fluid transport through multiple pathways. This segmentation enables the miniaturized device to achieve sufficient total flow rate by summing flows through individual narrow channels.
Solution Approach 2:
The patent transitions from two-dimensional planar channels to three-dimensional vertically stacked channels by forming channels through the thickness of the vibration layer. This vertical dimension multiplication allows more channels to be packed into a miniaturized footprint, increasing total flow capacity without increasing device planar area.
2Ease of manufacture
If device structure is simplified for ease of manufacture, then manufacturing complexity is reduced, but fluid transportation efficiency deteriorates
Solution Approach 1:
The vibration layer serves multiple functions simultaneously: it acts as a structural support layer, contains the fluid channels, provides the vibration mechanism for fluid pumping, and serves as a barrier layer. This multi-functionality reduces the need for separate dedicated components, simplifying manufacturing while maintaining efficient fluid transportation through its integrated channel structure.
Solution Approach 2:
The fluid channels are nested within the vibration layer thickness, with channels formed by etching through the layer. This nesting approach allows the channels to be embedded within the structural layer itself rather than requiring separate channel housings, reducing manufacturing steps while maintaining efficient fluid pathways.
3Volume of moving object
If device size is reduced for miniaturization, then portability is improved, but structural complexity increases
Solution Approach 1:
Multiple functional layers (barrier layer, vibration layer with channels, and outlet structure) are merged into an integrated assembly where the vibration layer serves as both structural support and fluid conduit. This merging reduces the number of separate components needed in miniaturized devices, lowering structural complexity while maintaining compact size.
Solution Approach 2:
The vibration layer functions as a flexible thin film structure that can vibrate to pump fluid through the channels. This thin-film approach allows compact device sizing while the flexibility enables active fluid control without requiring complex mechanical pumping components, reducing overall structural complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The micro fluid actuator achieves efficient fluid transportation by maximizing flow rate and preventing backflow, making it suitable for diverse industrial, biomedical, and electronic applications, including wearable devices, by leveraging MEMS processes for enhanced structural design and functionality.
Implementation Method 1
the piezoelectric actuation layer, an actuation region of which is formed correspondingly in position to the lower electrode region
Data Source
AI summary
A micro fluid actuator includes a first substrate, a chamber layer, a vibration layer, a first metal layer, a piezoelectric actuation layer, a second metal layer, a second substrate, an inlet layer, a resonance layer and an aperture array plate. The first substrate includes a plurality of first outflow apertures and a plurality of second outflow apertures. The chamber layer includes a storage chamber. The second metal layer includes an upper electrode pad and a lower electrode pad. While driving power having different phase charges is provided to the upper electrode pad and the lower electrode pad to drive and control the vibration layer to displace in a reciprocating manner, the fluid is inhaled from the exterior through the inlet layer, converged to the storage chamber, compressed and pushes out the aperture array plate, and then is discharged out from the micro fluid actuator to achieve fluid transportation.