Piezoelectric Membrane Microfluidic Valve for Electronics Integration

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Solution Overview

Problem

Current microfluidic valve manufacturing processes are not compatible with integration of electronic components and are costly, limiting their functionality and applicability in systems that require such integration.

Innovation Solution

A membrane microfluidic valve with piezoelectric actuation is developed, utilizing a semiconductor substrate with insulating layers and a piezoelectric actuator to control fluid flow, allowing for integration with electronic components and cost-effective manufacturing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If conventional microfluidic valve manufacturing processes are used, then the valve structure can be formed, but integration with electronic components is not possible and production costs are high

Engineering Contradiction:
Improveintegration capability with electronic componentsVSAvoidmanufacturing cost and process compatibility
Core Design Contradiction:
Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The patent merges the microfluidic valve structure with electronic components by integrating the piezoelectric actuator directly into the valve body. The piezoelectric element is positioned within the valve housing and mechanically coupled to the membrane, creating a unified device that combines fluid control and electrical actuation functions in a single integrated structure, thereby enabling adaptability with electronic systems while maintaining manufacturing efficiency

Inventive Principle:
Principle #5Merging (Combining)

2Ease of operation

If pneumatic actuation is used to control the valve, then the valve can be opened and closed, but the device complexity increases due to required air channels and chambers

Engineering Contradiction:
Improvevalve control capabilityVSAvoidstructure complexity with air channels and chambers
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

The patent replaces the pneumatic actuation system with a piezoelectric actuator. Instead of using air pressure to deform the membrane through complex air channels and chambers, the piezoelectric element directly converts electrical signals into mechanical displacement of the membrane. This substitution eliminates the need for pneumatic infrastructure while maintaining effective valve control, thereby reducing device complexity

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Reliability

If multi-layer structures are used to form the valve, then the valve functionality is achieved, but the manufacturing process becomes costly and time-consuming

Engineering Contradiction:
Improvevalve functionalityVSAvoidmanufacturing efficiency and production cost
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The patent employs a valve body made of a single material (such as polypropylene or PEEK) that simultaneously performs multiple functions: serving as the structural housing, providing the fluid passage, and acting as the mounting platform for the piezoelectric actuator. This multi-functional design eliminates the need for assembling multiple specialized layers, thereby improving manufacturing efficiency and reducing production costs while maintaining reliable valve functionality

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables the integration of electronic components within microfluidic systems, enhancing the functionality and reducing production costs, making the microfluidic valve suitable for applications involving fluids with micrometric particles and temperature control.

Implementation Method 1

a piezoelectric actuator (72) having a stack of layers comprising a first electrode (74); a piezoelectric region (75), extending on the first electrode (74); and a second electrode (76), extending on the piezoelectric region (75)

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentEP3726113B1Membrane microfluidic valve with piezoelectric actuation and manufacturing process thereof
Publication Date: 2024.03.20 STMICROELECTRONICS SRL
  • EP3726113B1 patent drawingFigure 1A~1B
  • EP3726113B1 patent drawingFigure 2~3
  • EP3726113B1 patent drawingFigure 4~6

AI summary

A microfluidic valve (50) formed in a body (51) having a first (51A) and a second (51B) surface; an inlet channel (54) extending in the body (51) from the second surface (51B); a first transverse channel (56) extending in the body (51) in a transverse direction with respect to the inlet channel (54); and an outlet channel (60) extending in the body (51) from the first surface (51A). The inlet channel (54), the first transverse channel (56) and the outlet channel (60) form a fluidic path (92). The microfluidic valve (50) further has an occluding portion (62), formed by the body (51) and extending over the transverse channel (56); and a piezoelectric actuator (72) coupled to the occluding portion (62) and configured to move the occluding portion (62) from an opening position of the valve (50), where the occluding portion (62) does not interfere with the fluidic path (92), and a closing position of the valve (50), where the occluding portion (62) interferes with and interrupts the fluidic path (92).