Piezoelectric Micromirror Retaining Element Design

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Solution Overview

Problem

Existing micromechanical devices face challenges with high drive voltages, power consumption, and space requirements, particularly in converting bending moments to torque for micromirrors, leading to increased production costs and limited integrability.

Innovation Solution

Integration of piezoelectric driving elements within retaining elements of micromechanical devices, allowing for compact design with low power dissipation and reduced space requirements, while using symmetrically arranged retaining elements to minimize dynamic deformation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If electrostatic drives are used to deflect micromechanical mirrors, then the drive mechanism is simple, but high drive voltages are required which cause electromechanical instabilities

Engineering Contradiction:

Improvedrive mechanismVSAvoidelectromechanical stability

Core Design Contradiction:

Device complexityVSReliability

Solution Approach 1:

The patent replaces the electrostatic drive mechanism with a magnetic drive mechanism. Instead of using electrostatic forces that require high voltages, the invention uses magnetic fields generated by current-carrying conductors to produce the necessary forces and torques for mirror deflection, thereby eliminating the electromechanical instabilities associated with high voltage electrostatic drives

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the operating parameters by using magnetic fields instead of electrostatic fields. This parameter change allows achieving the same mechanical effect (mirror deflection) with different physical principles that avoid the high voltage requirements and associated instabilities of electrostatic drives

Inventive Principle:

Principle #35Parameter changes

2Force

If magnetic drive is used to generate large forces or torques, then the driving capability is improved, but power consumption and technological effort increase

Engineering Contradiction:

Improvedriving force or torqueVSAvoidpower consumption

Core Design Contradiction:

ForceVSUse of energy by moving object

Solution Approach 1:

The patent applies magnetic drive elements locally at specific positions where force or torque is needed, rather than using a global magnetic drive system. By integrating magnetic drive elements directly into the retaining elements at strategic locations, the invention generates the necessary forces locally with minimized power consumption and reduced technological complexity

Inventive Principle:

Principle #3Local quality

3Device complexity

If conventional retaining element designs are used, then the structure is simple, but space requirements increase and integrability is limited

Engineering Contradiction:

Improvestructural simplicityVSAvoidspace requirements

Core Design Contradiction:

Device complexityVSArea of stationary object

Solution Approach 1:

The patent merges the retaining element structure with the drive mechanism by integrating magnetic drive elements directly into the retaining elements. This combination eliminates the need for separate drive components, thereby reducing space requirements and improving integrability while maintaining structural simplicity

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The retaining elements are designed to serve multiple functions simultaneously: they provide mechanical support, maintain structural integrity, and incorporate drive functionality through integrated magnetic elements. This multi-functionality reduces the overall space requirements and improves device integrability

Inventive Principle:

Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the production of high-quality micromechanical elements in a compact, cost-effective manner with reduced dynamic deformation and low power consumption, allowing for efficient monitoring and movement of functional elements.

Implementation Method 1

the first retaining element and the second retaining element each including a piezoelectric driving element, the driving element of the first retaining element and the driving element of the second retaining element being configured to move the functional element in accordance with electric excitation

Methodology Applied

Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

a sensor element, the sensor element being arranged in or on the retaining element and being configured to detect a deformation of the retaining element

Methodology Applied

Scientific EffectPiezoresistive effect: Piezoresistive Effect

Data Source

PatentUS8379283B2Micromechanical element and sensor for monitoring a micromechanical element

Publication Date: 2013.02.19 FRAUNHOFER GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG EV

AI summary

A micromechanical element includes a movable functional element, a first retaining element, a second retaining element, a third retaining element, and a fourth retaining element. The first retaining element and the functional element are connected at a first junction, the second retaining element and the functional element are connected at a second junction, the third retaining element and the functional element are connected at a third junction, and the fourth retaining element and the functional element are connected at a fourth junction. In addition, the first retaining element and the second retaining element each include a piezoelectric driving element, the driving element of the first retaining element and the driving element of the second retaining element being configured to move the functional element in accordance with electric excitation.