Piezoelectric Polymer Microstructure Array Fabrication
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current methods for manufacturing energy harvesters based on piezoelectric polymers are costly, inefficient, and not suitable for miniaturization or integration in micro-electro-mechanical systems (MEMS), particularly due to high temperature calendaring and extrusion molding processes which are difficult to implement in silicon planar processes.
Innovation Solution
A method involving photolithography and etching to create an imprint mold, followed by thermal and electric field-induced transformation of piezoelectric polymers into microstructure arrays, allowing for simultaneous polarization and formation of a piezoelectric energy harvester with a large depth-to-width ratio, using fluorine-doped tin oxide or indium tin oxide conductive glasses as substrates and electrodes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If high temperature calendaring and extrusion molding are used to prepare piezoelectric polymer films, then the piezoelectric property is improved, but the manufacturing cost increases and the process becomes difficult to implement in MEMS
Solution Approach 1:
The patent changes the processing parameters from high temperature (calendaring/extrusion) to low temperature solution processing. The piezoelectric polymer is dissolved in a solvent to form a solution, which is then deposited and dried at low temperatures, avoiding the high temperature processes that are difficult to implement in MEMS while still achieving good piezoelectric properties through solution-based processing and subsequent polarization
Solution Approach 2:
The patent replaces the mechanical processes of calendaring and extrusion molding with a chemical solution-based approach. Instead of using mechanical pressure and heat to form the film, the invention uses solution deposition followed by solvent evaporation, substituting mechanical forming with a chemical-physical process that is more compatible with MEMS fabrication
2Reliability
If mechanical stretching orientation is performed to improve piezoelectric property, then the piezoelectric performance is enhanced, but the manufacturing efficiency decreases and production cost increases
Solution Approach 1:
The patent merges the film formation process with the orientation process. By controlling the evaporation of the solvent and the subsequent polarization process, the polymer chains are oriented during the phase transition from solution to solid state, eliminating the need for a separate mechanical stretching step. This integration maintains piezoelectric performance while significantly improving manufacturing efficiency
Solution Approach 2:
The patent performs preliminary orientation of the polymer chains during the solvent evaporation process before the actual polarization step. The controlled drying conditions induce preliminary alignment of the polymer chains, which then facilitates more effective polarization at lower fields and shorter times, thereby improving overall manufacturing efficiency
3Manufacturing precision
If traditional film preparation and stretching processes are used, then the piezoelectric film quality is improved, but the manufacturing procedure becomes lengthy and costly
Solution Approach 1:
The patent utilizes the phase transition of the solvent from liquid to vapor during the drying process to achieve film formation. As the solvent evaporates, the polymer precipitates and forms a solid film with controlled morphology. This phase transition-based approach eliminates multiple processing steps while maintaining film quality, significantly reducing the manufacturing procedure duration
Solution Approach 2:
The patent segments the traditional multi-step process into a single integrated solution processing step followed by controlled drying and polarization. Instead of separate steps for film casting, stretching, and polarization, the invention combines these functions into a unified process flow, reducing the overall manufacturing time while maintaining or improving film quality
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method reduces production costs, simplifies processes, and enhances efficiency, enabling the creation of energy harvesters with improved energy conversion efficiency, suitable for applications in underwater acoustic detection, piezoelectric sensing, and ultrasonic transduction, while being adaptable for MEMS and wireless energy supply.
Implementation Method 1
Under actions of both an electric field and a thermal field, a piezoelectric polymer is theologically transformed into a microstructure and is simultaneously polarized along a field direction
Implementation Method 2
simultaneously polarized along a field direction thereby acquiring a strong piezoelectric property
Implementation Method 3
a piezoelectric polymer microstructure array connected to an upper electrode and a substrate is obtained and the final piezoelectric energy harvester is directly formed
Implementation Method 4
raising a temperature in the oven to be higher than a glass transition temperature of the piezoelectric polymer
Implementation Method 5
raising a temperature in the oven to be higher than a glass transition temperature of the piezoelectric polymer
Implementation Method 6
regulating a voltage whereby enabling an electric force applied on the column array of the piezoelectric polymer to counteract a surface tension and a viscous resistance rheology
Implementation Method 7
enabling an electric force applied on the column array of the piezoelectric polymer to counteract a surface tension and a viscous resistance rheology
Implementation Method 8
cooling the oven to room temperature and removing the voltage whereby obtaining a group of microstructure array of the piezoelectric polymer
Data Source
AI summary
A method for manufacturing an energy harvester including a piezoelectric polymer microstructure array. The method includes: preparing a micro-column array of a piezoelectric polymer on a substrate; supplying a plate electrode as an upper electrode, allowing the substrate and the upper electrode to form a pair of plate electrodes; applying a DC voltage between the pair of the plate electrodes; heating the substrate to a temperature higher than a glass transition temperature of the piezoelectric polymer and performing rheological formation of the micro-column array with the DC voltage still being applied until the column array of the piezoelectric polymer reaches the upper electrode to form a mushroom-shaped structure array; and cooling and solidifying the piezoelectric polymer to obtain the piezoelectric energy harvester.