Piezoelectric Device Recess Relocation for Electrode Integrity
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The existing piezoelectric devices in liquid ejecting heads face challenges in improving displacement characteristics without compromising the integrity of the lower electrode, as deeper recess portions on the common electrode can lead to separation issues and operational troubles.
Innovation Solution
A piezoelectric device configuration where the recess portion is formed outside the area overlapping with the first electrode on the supporting layer, with a curved bottom surface, and utilizing a zirconia second supporting layer to prevent lead spread from the piezoelectric body, enhancing the displacement characteristic and reliability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the recess portion on the lower electrode is formed deeper to improve displacement characteristic, then the displacement characteristic is improved, but the lower electrode is separated and operational troubles occur
Solution Approach 1:
The invention extracts the harmful effect by removing the recess portion from the lower electrode area. Instead of forming the recess portion on the lower electrode as in conventional technology, the invention positions it on the supporting layer only, effectively taking out the cause of electrode separation while preserving the displacement improvement benefit
Solution Approach 2:
The invention segments the recess portion formation into a specific location on the supporting layer that does not overlap with the lower electrode area. This spatial segmentation allows the recess portion to provide displacement characteristics without compromising electrode integrity
2Manufacturing precision
If the recess portion is formed on the lower electrode to improve displacement characteristic, then the displacement characteristic is improved, but troubles occur in driving the piezoelectric device
Solution Approach 1:
The invention extracts the problematic interaction between the recess portion and lower electrode by positioning the recess portion exclusively on the supporting layer. This eliminates the driving troubles caused by electrode separation while maintaining the displacement characteristic improvement
3Manufacturing precision
If the recess portion is formed deeper in the lower electrode, then the displacement characteristic is further improved, but the lower electrode separation occurs
Solution Approach 1:
The invention extracts the harmful effect of deep recess formation on the lower electrode by relocating the recess portion to the supporting layer. This allows deeper recess formation without compromising lower electrode structural integrity
Solution Approach 2:
The invention changes the spatial dimension of recess portion formation from the electrode layer to the supporting layer beneath it. This dimensional relocation enables deeper recesses that improve displacement characteristics without affecting electrode strength
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration improves the displacement characteristic of the piezoelectric device, reduces stress during deformation, and increases the reliability of the device by preventing recess formation on critical electrodes, thus enhancing the operational stability and efficiency of the liquid ejecting head.
Implementation Method 1
a piezoelectric element which is configured with a lower electrode which functions as a common electrode with respect to a plurality of the pressure chambers, a piezoelectric body which is formed in every pressure chamber, and an upper electrode which functions as an individual electrode
Data Source
AI summary
A piezoelectric device includes a supporting body, a supporting layer that is stacked on the supporting body, a first electrode that is formed on a side opposite to the supporting body side of the supporting layer, a piezoelectric body that is formed on a side opposite to the supporting layer side of the first electrode, and a second electrode that is formed on a side opposite to the first electrode side of the piezoelectric body, in which the piezoelectric body is formed throughout an area covering the first electrode, the second electrode is formed throughout an area covering the piezoelectric body, and a recess portion which is recessed toward the supporting body is formed outside an area overlapping with the first electrode in the supporting layer.