Piezoelectric Resonator Sensor With Rear-Surface Temperature Isolation
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional sensing sensors using Quartz Crystal Microbalance (QCM) type units are susceptible to damage and performance deterioration due to gases containing oxygen plasma or oxygen radicals generated in semiconductor manufacturing processes, leading to corrosion of internal components.
Innovation Solution
A sensing sensor design featuring a piezoelectric oscillation portion with reaction and reference electrodes on a sensor substrate, a support substrate with a cavity for a temperature sensor, an electrode cover with a through hole, and a partition wall to prevent gas exposure, along with a clip for securing the electrode cover, which reduces corrosion risk.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If the temperature sensor is disposed on the upper surface of the sensor substrate (same side as electrodes), then the sensor structure is simpler and easier to manufacture, but the temperature sensor becomes susceptible to corrosion from oxygen plasma and oxygen radicals
Solution Approach 1:
The temperature sensor is relocated from the upper surface (2D plane) to the lower surface of the sensor substrate, utilizing the third dimension (depth/thickness) to achieve spatial separation. This dimensional transition allows the temperature sensor to be positioned on the opposite side of the substrate, effectively isolating it from the corrosive gas environment while maintaining manufacturing simplicity.
Solution Approach 2:
The sensor substrate itself acts as an intermediary barrier between the corrosive gas and the temperature sensor. By positioning the temperature sensor on the lower surface, the substrate material serves as a protective intermediary that prevents direct contact between the harmful gas and the temperature sensor, thereby enhancing corrosion resistance.
2Volume of moving object
If the sensor substrate is thin to reduce overall sensor size, then the sensor becomes more compact, but the temperature sensor becomes more vulnerable to corrosive gas penetration
Solution Approach 1:
The solution transitions from a planar arrangement to a three-dimensional configuration by placing the temperature sensor on the lower surface of the substrate. This spatial reorganization allows the use of thin substrates for compactness while the vertical separation provides inherent protection against gas penetration, as the corrosive gas must traverse the entire substrate thickness to reach the temperature sensor.
3Productivity
If the opening portion is made large to allow sufficient gas flow, then gas flow is improved, but the reaction electrode becomes more exposed to corrosive gases
Solution Approach 1:
The sensor structure is segmented into distinct functional zones: the upper surface contains the reaction and reference electrodes for sensing, while the lower surface houses the temperature sensor. This segmentation allows the opening portion to be optimized for gas flow without compromising the temperature sensor, as the two sensor components are spatially separated and serve different functions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design effectively prevents corrosion of internal components, maintaining sensor performance and extending its service life by minimizing contact between corrosive gases and critical elements.
Implementation Method 1
a piezoelectric oscillation portion in which a reaction electrode to which a target substance in a gas adheres and a reference electrode to which the target substance does not adhere are disposed on a sensor substrate as a piezoelectric resonator
Implementation Method 2
a temperature sensor is arranged on an opposite side surface of a surface on which the reaction electrode and the reference electrode are disposed
Data Source
AI summary
A sensing sensor includes a piezoelectric oscillation portion in which a reaction electrode to which a target substance in a gas adheres and a reference electrode to which the target substance does not adhere are disposed on a sensor substrate as a piezoelectric resonator, an exterior cover that has an opening portion through which the gas passes and covers the piezoelectric oscillation portion, and a support substrate that supports the piezoelectric oscillation portion. The sensor substrate is mounted on the support substrate such that the reaction electrode is opposed to the opening portion, and a temperature sensor is arranged on an opposite side surface of a surface on which the reaction electrode and the reference electrode are disposed.