Piezoelectric Spatial Light Modulator for Fast Phase Control

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Solution Overview

Problem

Liquid Crystal on Silicon (LCoS) spatial light modulators have a long response time due to the slow rotational speed of liquid crystal molecules, which limits their effectiveness in precise light modulation.

Innovation Solution

A spatial light modulator using a substrate with phase modulation devices that include alternately arranged first and second electrodes sandwiching a piezoelectric layer, where the piezoelectric material changes length with applied electric fields to modulate light phase, replacing liquid crystals for faster response times.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If liquid crystal molecules are used for phase modulation in LCoS-SLM, then the device can achieve precise light modulation, but the response time is long due to slow rotational speed of liquid crystal molecules

Engineering Contradiction:
Improvelight modulation precisionVSAvoidresponse time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent changes the material parameter from liquid crystal to piezoelectric material, fundamentally altering the response mechanism from rotational motion to elastic deformation. This parameter change enables faster response times while maintaining phase modulation capability through electro-optic effects in the piezoelectric material.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent replaces the mechanical rotational system of liquid crystal molecules with an elastic deformation system in piezoelectric material. The phase modulation is achieved through stress-induced refractive index changes rather than molecular rotation, eliminating the slow rotational response limitation.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Device complexity

If liquid crystal molecules are used for phase modulation, then the structure can be simple, but the response speed is slow

Engineering Contradiction:
Improvemodulator structure complexityVSAvoidresponse speed
Core Design Contradiction:
Device complexityVSSpeed

Solution Approach 1:

The patent changes the physical state and response mechanism parameter from liquid crystal's rotational motion to piezoelectric material's elastic deformation. This fundamental parameter change achieves faster response speed while the layered structure (substrate, electrode, piezoelectric layer, counter electrode) maintains reasonable structural simplicity.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The use of piezoelectric materials significantly reduces the response time of the spatial light modulator compared to LCoS-SLMs, enhancing the modulation speed and efficiency.

Implementation Method 1

A piezoelectric layer is sandwiched between the first electrode and the second electrode. The piezoelectric layer includes a piezoelectric material. A length of the piezoelectric material in a direction perpendicular to the substrate can be changed with the change in the intensity of an electric field applied by the first electrode and the second electrode

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

thereby changing the optical path of the light irradiating onto the phase modulation device to modulate a phase of the incident light by the spatial light modulator

Methodology Applied
Scientific EffectOptical path modulation: Refraction

Data Source

PatentUS10466495B2Spatial light modulator and display device
Publication Date: 2019.11.05 SHANGHAI TIANMA MICRO ELECTRONICS CO LTD
  • US10466495B2 patent drawing
  • US10466495B2 patent drawing
  • US10466495B2 patent drawing

AI summary

Disclosed are a spatial light modulator and a display device. The spatial light modulator includes: a substrate; the phase modulation devices disposed on a side of the substrate and arranged in an array, and each of the plurality of phase modulation devices includes a plurality of electrodes, the plurality of electrodes includes at least one first electrode and at least one second electrode, the at least one first electrode and the at least one second electrode are alternately arranged in a direction departing from the substrate, and a piezoelectric layer is sandwiched between the first electrode and the second electrode; and the piezoelectric layer comprises a piezoelectric material.