Piezoelectric Element Static Charge Dissipation via Conductive Intermediary

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Solution Overview

Problem

Conventional thin-film piezoelectric-material elements face issues with static electricity charges due to size differences between the piezoelectric-material film and electrode films, leading to electric failures.

Innovation Solution

A thin-film piezoelectric-material element with a laminated structure featuring a piezoelectric-material film larger than the upper electrode film, including riser end-surfaces and step-surfaces on the upper electrode film, and protected by alloy-based protective films to prevent static electricity accumulation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If the piezoelectric-material film is made larger than the upper electrode film, then the electrode structure can be formed, but static electricity charges accumulate on the piezoelectric-material film surface causing electric failures

Engineering Contradiction:

Improveelectrode structure formationVSAvoidelectric failure prevention

Core Design Contradiction:

Ease of manufactureVSReliability

Solution Approach 1:

A conductive film is introduced as an intermediary layer between the piezoelectric-material film and the upper electrode film. This conductive film serves as a charge dissipation path, preventing static electricity accumulation on the piezoelectric-material film surface while allowing the electrode structure to function properly.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The invention converts the harmful static electricity charge accumulation into a beneficial charge dissipation mechanism. By providing a conductive path through the conductive film, the previously harmful electrical charges are now safely dissipated, preventing electric failures while maintaining the necessary electrode structure.

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

2Manufacturing precision

If the upper electrode film is made smaller than the piezoelectric-material film, then the electrode pattern can be defined, but charges remain on the outside parts of the piezoelectric-material film causing static electricity

Engineering Contradiction:

Improveelectrode pattern definitionVSAvoidstatic electricity accumulation

Core Design Contradiction:

Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The conductive film acts as an intermediary that extends beyond the upper electrode film boundaries, providing a charge dissipation path for the outside parts of the piezoelectric-material film. This allows precise electrode patterning while preventing charge accumulation in the regions where the electrode film does not cover.

Inventive Principle:

Principle #24Intermediary (Mediator)

3Ease of manufacture

If the side surface of the piezoelectric-material film is processed into taper-shaped or step-shaped, then the film structure can be formed, but charges easily remain in the outside parts causing static electricity

Engineering Contradiction:

Improvefilm structure formationVSAvoidcharge accumulation

Core Design Contradiction:

Ease of manufactureVSObject-affected harmful factors

Solution Approach 1:

The conductive film is applied over the taper-shaped or step-shaped side surfaces of the piezoelectric-material film, providing continuous charge dissipation paths along the complex geometries. This maintains the manufacturable film structures while preventing charge accumulation in the outside parts created by the taper or step profiles.

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively prevents static electricity charges and maintains the performance of the thin-film piezoelectric-material element, reducing the likelihood of electric failures and ensuring stable operation.

Implementation Method 1

A micro actuator using a thin-film piezoelectric-material element is known formerly as the supplementary actuator. The thin-film piezoelectric-material element has a piezoelectric-material and a pair of electrodes formed to sandwich the piezoelectric-material, and each of them is formed to be a thin-film shape.

Methodology Applied

Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS11289641B2Thin-film piezoelectric-material element, method of manufacturing the same, head gimbal assembly and hard disk drive

Publication Date: 2022.03.29 SAE MAGNETICS (HK) LTD

AI summary

A thin-film piezoelectric-material element includes a laminated structure part having a lower electrode film, a piezoelectric-material film laminated on the lower electrode film and an upper electrode film laminated on the piezoelectric-material film. The piezoelectric-material film includes a size larger than the upper electrode film, a riser end-surface and step-surface formed on a top-surface of the upper electrode film side. The riser end-surface connects smoothly with a peripheral end-surface of the upper electrode film and vertically intersects with the top-surface. The step-surface intersects vertically with the riser end-surface.