Piezoelectric Monocrystalline Substrate Bonding via Oxide Interface Layer
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Solution Overview
Problem
It is particularly difficult to bond a piezoelectric monocrystalline substrate made of lithium niobate or tantalum niobate stably and strongly onto a supporting substrate.
Innovation Solution
A bonded body comprising a supporting substrate, a piezoelectric monocrystalline substrate with a material represented by LiAO3, and a bonding layer comprising an oxide of niobium or tantalum, with an interface layer of ExO(1-x) between the substrate and the bonding layer, where E represents niobium or tantalum and 0.29≤x≤0.89, enhancing the strength at the interface.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a piezoelectric monocrystalline substrate made of lithium niobate or tantalum niobate is directly bonded onto a supporting substrate, then the bonding process is simple, but the bonding strength and stability are insufficient
Solution Approach 1:
An intermediate layer comprising an oxide of niobium or tantalum is introduced between the piezoelectric monocrystalline substrate and the supporting substrate. This intermediate layer acts as a mediator that enhances bonding strength and stability, resolving the contradiction between simple bonding process and insufficient bonding strength.
Solution Approach 2:
The bonding structure is designed as a composite system consisting of the piezoelectric monocrystalline substrate, the oxide intermediate layer, and the supporting substrate. This composite structure leverages the complementary properties of each material to achieve both strong bonding and manufacturing feasibility.
2Productivity
If a piezoelectric monocrystalline substrate made of lithium niobate or tantalum niobate is directly bonded onto a supporting substrate, then the manufacturing steps are reduced, but the bonding stability is poor
Solution Approach 1:
The oxide intermediate layer serves as a stabilizing intermediary that improves bonding reliability without significantly complicating the manufacturing process. The layer provides chemical and mechanical stability to the bonding interface.
Solution Approach 2:
The introduction of the oxide intermediate layer changes the chemical and physical parameters at the bonding interface, improving bonding stability while maintaining reasonable manufacturing efficiency through established oxide deposition techniques.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration provides a strong and stable microstructure for the piezoelectric monocrystalline substrate, achieving high crack opening strength and improved bonding with the supporting substrate.
Implementation Method 1
a bonding layer provided between the supporting substrate and the piezoelectric monocrystalline substrate, wherein the bonding layer comprises a material comprising an oxide of at least one element selected from the group consisting of niobium and tantalum, and wherein the bonded body further comprises an interface layer along an interface between the piezoelectric monocrystalline substrate and the bonding layer, the interface layer comprising a composition of ExO(1-x)
Data Source
AI summary
A piezoelectric monocrystalline substrate is composed of a material represented by LiAO3 (A represents at least one element selected from the group consisting of niobium and tantalum), a bonding layer is compose of a material of an oxide of at least one element selected from the group consisting of niobium and tantalum, and an interface layer is provided along an interface between the piezoelectric monocrystalline substrate 6 and bonding layer, and the interface layer has a composition of ExO(1-x) (E represents at least one element selected from the group consisting of niobium and tantalum and 0.29≤x≤0.89).