Multilayer Piezoelectric Substrate Layout for Stress-Resistant SAW Packaging

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Solution Overview

Problem

The packaging process for multilayer piezoelectric substrate packages applies stresses to the piezoelectric layer, leading to reliability issues such as cracking during heat cycle testing, which affects the performance and durability of acoustic wave devices.

Innovation Solution

A surface acoustic wave package design where the piezoelectric layer is positioned between a substrate and a metal structure, with the outer edge of the piezoelectric layer spaced inward of the metal package to prevent direct contact and reduce stress, and a thermally conductive structure is attached to the substrate and signal lines to enhance thermal dissipation without contacting the piezoelectric layer.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If the piezoelectric layer is directly contacted with the metal package during packaging, then the packaging process can be simplified, but stress is applied to the piezoelectric layer causing cracking and reliability issues

Engineering Contradiction:
Improvepackaging process simplicityVSAvoidpiezoelectric layer reliability
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent introduces a spacer structure as an intermediary element between the piezoelectric layer and the metal package. This spacer physically separates the two components, preventing direct contact and the associated stress transfer that causes cracking. The spacer acts as a mediator that maintains the necessary spatial relationship while eliminating the harmful interaction, thus preserving piezoelectric layer reliability without significantly complicating the packaging process.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If the piezoelectric layer is spaced inward from the metal package, then stress-induced cracking is reduced, but the device complexity increases

Engineering Contradiction:
Improvepiezoelectric layer reliabilityVSAvoidpackage structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent applies segmentation by dividing the package structure into distinct functional zones: the piezoelectric layer region, the spacer region, and the metal package region. This spatial segmentation creates clear boundaries that prevent stress transfer while maintaining structural integrity. By segmenting the structure, the patent achieves reliability improvement without excessive complexity, as each segment serves a specific function and can be manufactured independently.

Inventive Principle:
Principle #1Segmentation

3Power

If thermal dissipation is improved by attaching thermally conductive structures close to the piezoelectric layer, then power handling capability increases, but stress on the piezoelectric layer increases

Engineering Contradiction:
Improvepower handling capabilityVSAvoidstress on piezoelectric layer
Core Design Contradiction:
PowerVSStress or pressure

Solution Approach 1:

The spacer serves as a thermal management intermediary that enables heat dissipation pathways without creating mechanical stress. By positioning the thermally conductive structures in relation to the spacer rather than directly to the piezoelectric layer, the design achieves effective thermal coupling for power handling while the spacer maintains mechanical decoupling to prevent stress-induced cracking.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enhances the mechanical ruggedness and reliability of the acoustic wave devices by reducing stress-induced damage and improving thermal dissipation, allowing for high power handling and reduced frequency spurious responses, thus improving the overall performance and durability of the devices.

Implementation Method 1

A thermally conductive structure is attached to one or both of the substrate and the one or more signal lines

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS20230110477A1Packaged acoustic wave devices with multilayer piezoelectric substrate
Publication Date: 2023.04.13 SKYWORKS SOLUTIONS INC
  • US20230110477A1 patent drawing
  • US20230110477A1 patent drawing
  • US20230110477A1 patent drawing

AI summary

A surface acoustic wave package has a piezoelectric layer over a substrate and a thermally conductive structure attached to the substrate. The outer boundary of the piezoelectric layer is removed (e.g., etched) so that a resulting outer edge of the piezoelectric layer is spaced inward of an inner edge of the thermally conductive structure. The piezoelectric layer does not contact the thermally conductive structure to inhibit damage to the piezoelectric layer due to a stress differential between the substrate and the thermally conductive structure during a packaging process.