Multi-Layer Piezoelectric Substrate Packaging With Stress Buffer Layers

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Solution Overview

Problem

Multi-layer piezoelectric substrates in electronic packages face reliability issues due to stresses during the packaging process, which can lead to cracking of the piezoelectric layer.

Innovation Solution

A polyimide layer is applied over the outer boundary of the piezoelectric layer to act as a buffer between the piezoelectric layer and metal portions, reducing stress and preventing damage. Additionally, a dielectric layer is used between the piezoelectric layer and thermally conductive structures to further mitigate stress.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If metal layers are directly bonded to the piezoelectric layer during packaging, then electrical connection and thermal conduction are improved, but stress concentration causes cracking and reliability degradation

Engineering Contradiction:
Improvepackage reliabilityVSAvoidstress on piezoelectric layer
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

A polyimide layer is introduced as an intermediary between the metal portion and the piezoelectric layer. This intermediate layer buffers the stress transmitted from the metal layer to the piezoelectric layer, preventing stress concentration and cracking while maintaining the electrical and thermal connection functionality.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The polyimide layer is applied beforehand to the piezoelectric layer before the metal portion is bonded. This pre-applied cushioning layer anticipates and mitigates the stress that will be transmitted during subsequent packaging processes, protecting the piezoelectric layer from damage.

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

2Ease of manufacture

If the packaging process applies necessary stresses for assembly, then manufacturing is enabled, but the piezoelectric layer cracks due to excessive stress

Engineering Contradiction:
Improvepackaging process feasibilityVSAvoidpiezoelectric layer integrity
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The polyimide layer serves as a stress-buffering intermediary that allows the packaging process to proceed with necessary assembly stresses while protecting the piezoelectric layer from exceeding its stress tolerance, thus enabling manufacturing without compromising layer integrity.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Area of stationary object

If metal portions are placed close to the piezoelectric layer for compact design, then device size is reduced, but stress damage to the piezoelectric layer increases

Engineering Contradiction:
Improvepackage areaVSAvoidpiezoelectric layer strength
Core Design Contradiction:
Area of stationary objectVSStrength

Solution Approach 1:

The polyimide layer enables compact design by allowing metal portions to be placed close to the piezoelectric layer while still providing stress protection. The intermediate layer buffers any stress transmitted through the close proximity arrangement, maintaining piezoelectric layer strength despite reduced spacing.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The use of polyimide and dielectric layers significantly reduces stress on the piezoelectric layer, enhancing the reliability of the electronic packages by preventing deformation and cracking, as demonstrated by stress simulations showing a reduction in peak stress by up to 79%.

Implementation Method 1

applying a polyimide layer over an outer boundary of the piezoelectric layer so that the polyimide layer is interposed between the piezoelectric layer and a metal portion to inhibit stresses from the metal layer damaging the piezoelectric layer

Methodology Applied
Scientific EffectStress buffering: Elasticity

Implementation Method 2

A dielectric layer is disposed over an outer edge portion of the piezoelectric layer and interposed between the piezoelectric layer and the thermally conductive structure to thereby reduce a stress on the piezoelectric layer from the thermally conductive structure

Methodology Applied
Scientific EffectStress reduction: Elasticity

Data Source

PatentUS20230225212A1Method of making packages with multi-layer piezoelectric substrate
Publication Date: 2023.07.13 SKYWORKS SOLUTIONS INC
  • US20230225212A1 patent drawing
  • US20230225212A1 patent drawing
  • US20230225212A1 patent drawing

AI summary

A method of making an electronics package with a multi-layer piezoelectric substrate includes bonding a piezoelectric layer over a substrate. The method also includes applying a polyimide layer over an outer boundary of the piezoelectric layer so that the polyimide layer is interposed between the piezoelectric layer and a metal portion (e.g., of copper (Cu)) to inhibit (e.g., prevent) stresses from the metal layer damaging the piezoelectric layer.