Multi-Layer Piezoelectric Substrate Stress Buffering in Packages

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Solution Overview

Problem

Multi-layer piezoelectric substrates in electronic packages face reliability issues due to stresses during the packaging process, leading to cracking of the piezoelectric layer.

Innovation Solution

A polyimide layer is applied over the outer boundary of the piezoelectric layer to act as a buffer between the piezoelectric layer and metal portions, reducing stress and preventing damage, and a thermally conductive structure is attached with a dielectric layer interposed between the piezoelectric layer and the thermally conductive structure to further reduce stress.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If metal layers are directly bonded to the piezoelectric layer during packaging, then electrical connection is achieved, but stresses cause cracking of the piezoelectric layer

Engineering Contradiction:
Improvereliability of electronic packageVSAvoidstrength of piezoelectric layer
Core Design Contradiction:
ReliabilityVSStrength

Solution Approach 1:

A polyimide layer is introduced as an intermediary between the metal layer and the piezoelectric layer. This intermediate layer acts as a stress buffer that absorbs and distributes mechanical stresses during packaging processes, preventing direct stress transmission to the piezoelectric layer and avoiding cracking while maintaining electrical connectivity through the metal layer.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The packaging process parameters are modified to reduce thermal and mechanical stresses. This includes controlling bonding temperatures and using stress-relief techniques during assembly to minimize the magnitude of stresses applied to the piezoelectric layer, thereby preventing damage while achieving reliable electrical connections.

Inventive Principle:
Principle #35Parameter changes

2Area of stationary object

If metal layer is placed close to piezoelectric layer for compact design, then device size is reduced, but stress concentration increases causing damage

Engineering Contradiction:
Improvefootprint of electronic packageVSAvoidstress concentration on piezoelectric layer
Core Design Contradiction:
Area of stationary objectVSObject-affected harmful factors

Solution Approach 1:

The polyimide layer serves as a stress-distributing intermediary that allows the metal layer to be positioned closer to the piezoelectric layer for compact design. The intermediate material absorbs stress concentrations that would otherwise occur at sharp interfaces, enabling reduced footprint while maintaining piezoelectric layer integrity.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The polyimide layer functions as a flexible thin film that can accommodate thermal expansion differences and mechanical deformations between the rigid metal layer and piezoelectric layer. This flexible intermediate structure prevents stress concentration while allowing compact packaging geometry.

Inventive Principle:
Principle #30Flexible shells and thin films

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution significantly reduces stress on the piezoelectric layer, enhancing the reliability of the electronic packages by preventing deformation and damage, such as cracking, during the packaging process and heat cycle testing.

Implementation Method 1

The outer boundary of the piezoelectric layer is covered with a polyimide layer so that the polyimide layer is interposed between the piezoelectric layer and a metal portion to inhibit stresses from the metal layer damaging the piezoelectric layer

Methodology Applied
Scientific EffectStress buffering: Elasticity

Implementation Method 2

A dielectric layer is disposed over an outer edge portion of the piezoelectric layer and interposed between the piezoelectric layer and the thermally conductive structure to thereby reduce a stress on the piezoelectric layer from the thermally conductive structure

Methodology Applied
Scientific EffectStress reduction: Elasticity

Data Source

PatentUS20230223919A1Packages with multi-layer piezoelectric substrate
Publication Date: 2023.07.13 SKYWORKS SOLUTIONS INC
  • US20230223919A1 patent drawing
  • US20230223919A1 patent drawing
  • US20230223919A1 patent drawing

AI summary

An electronics package has a multi-layer piezoelectric substrate with a piezoelectric layer over a substrate. The outer boundary of the piezoelectric layer is covered with a polyimide layer so that the polyimide layer is interposed between the piezoelectric layer and a metal portion (e.g., of copper (Cu)) to inhibit (e.g., prevent) stresses from the metal layer damaging the piezoelectric layer..