Piezoelectric Element Tetragonal Crystal Structure Deflection Control
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Solution Overview
Problem
In piezoelectric elements, particularly deflection displacement-type elements, controlling the initial deflection position is challenging due to the internal stress of the piezoelectric layer, limiting the ability to adjust the displacement amount effectively.
Innovation Solution
A piezoelectric element with a vibrating section comprising a vibrating plate, a first electrode, a piezoelectric layer, and a second electrode, where the crystal orientation of the piezoelectric material is (100) and has a tetragonal crystal structure, with a total thickness relationship of T1≥T2, allowing for controlled initial deflection position adjustment and increased displacement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If PZT with MPB composition is used as the piezoelectric layer, then high piezoelectric performance is achieved, but the ability to control initial deflection position using compressive stress is lost
Solution Approach 1:
The patent changes the crystal structure parameter of the piezoelectric material from MPB composition (monoclinic/rhombohedral) to a composition that forms a tetragonal crystal structure. This parameter change in the material's crystallographic properties enables the piezoelectric layer to generate compressive stress, thereby restoring the ability to control the initial deflection position while maintaining high piezoelectric performance.
2Ease of manufacture
If the thickness relationship between vibrating plate and piezoelectric layer is not optimized, then manufacturing is simplified, but the displacement amount of the vibrating plate is reduced
Solution Approach 1:
The patent establishes a specific parameter relationship between the thicknesses of different layers (T1 ≥ T2, where T1 is the total thickness of the vibrating plate and first electrode, and T2 is the total thickness of the piezoelectric layer and second electrode). This parameter optimization enables effective control of the initial deflection position and maximizes the displacement amount of the vibrating plate while maintaining manufacturing feasibility.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances the displacement amount of the vibrating plate and the entire element by effectively controlling the initial deflection position, improving the piezoelectric element's performance and characteristics.
Implementation Method 1
a piezoelectric element including a vibrating section including a vibrating plate, a first electrode, a piezoelectric layer, and a second electrode, in which a crystal orientation of a piezoelectric material forming the piezoelectric layer is (100) and a crystal structure of the piezoelectric material is a tetragonal crystal
Data Source
AI summary
A piezoelectric element having a vibrating section including a vibrating plate, a first electrode, a piezoelectric layer, and a second electrode, in which a crystal orientation of a piezoelectric material forming the piezoelectric layer is (100) and a crystal structure of the piezoelectric material is a tetragonal crystal, and a total thickness T1 of the vibrating plate and the first electrode and a total thickness T2 of the piezoelectric layer and the second electrode have a relationship of T1≥T2.