Piezoelectric MEMS Transducer Temperature Control
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Solution Overview
Problem
Piezoelectric transducers, particularly those using materials like aluminum nitride and molybdenum, face performance issues due to temperature-dependent resonance frequencies, with existing devices struggling to maintain performance across varying temperature conditions.
Innovation Solution
Incorporating a thermoelectric device proximate to the microelectronic ultrasonic transducer to provide controlled heating and cooling, ensuring the transducer operates within a stable temperature range, thereby compensating for temperature variations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If the transducer operates at elevated temperatures, then the resonance frequency shifts, but the device performance deteriorates
Solution Approach 1:
The patent changes the temperature parameter of the transducer by introducing a thermoelectric device that can actively heat or cool the piezoelectric membrane, thereby controlling the resonance frequency to remain stable despite external temperature variations
Solution Approach 2:
The patent implements temperature control through feedback by using a thermoelectric device that responds to temperature conditions to adjust the membrane temperature, maintaining optimal operating conditions and resonance frequency stability
2Temperature
If the transducer is subjected to reduced temperatures, then the device may freeze or condense, but the operation becomes unreliable
Solution Approach 1:
The patent changes the temperature parameter by using the thermoelectric device to heat the piezoelectric membrane when temperatures drop, preventing freezing and condensation while maintaining operational reliability
Solution Approach 2:
The patent uses feedback control through the thermoelectric device to monitor temperature conditions and activate heating when necessary, ensuring the transducer operates reliably across varying temperature conditions
3Reliability
If a thermoelectric device is added for temperature control, then the performance stability improves, but the device complexity increases
Solution Approach 1:
The patent merges the temperature control function with the transducer structure by integrating the thermoelectric device proximate to the piezoelectric membrane, combining multiple functions into a unified device while maintaining performance stability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively maintains the transducer's performance stability, prevents freezing and condensation, and ensures consistent operation by regulating the temperature to a desired level or range, enhancing frequency maintenance and sensitivity.
Implementation Method 1
a thermoelectric device proximate to the MUT and configured to provide heat to and remove heat from the MUT
Implementation Method 2
A piezoelectric transducer comprises a piezoelectric material disposed between electrodes. The application of a time-varying electrical signal will cause a mechanical vibration across the transducer
Implementation Method 3
the application of a time-varying mechanical signal will cause a time-varying electrical signal to be generated by the piezoelectric material of the transducer
Data Source
AI summary
In a representative embodiment, an apparatus, comprises a substrate; a microelectronic ultrasonic transducer (MUT) disposed over the substrate; and a thermoelectric device disposed proximate to the MUT and configured to provide heat to or remove heat from the MUT. A microelectromechanical MEMs device is also described.