Piezoelectric Vibrator Natural Frequency Evaluation Method

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Solution Overview

Problem

In devices like MEMS mirrors, structural variations during manufacturing lead to varying natural frequencies of piezoelectric vibrators, making it difficult to determine and adjust the optimal drive frequency, resulting in decreased efficiency.

Innovation Solution

A method to evaluate the natural frequency of piezoelectric vibrators by acquiring power-generating wave information, measuring the period of the wave, and determining the reciprocal as the natural frequency, which is then used to drive the transducer efficiently and control the natural frequency to a specific value.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the drive frequency is determined in advance, then the device can operate with a fixed frequency, but the efficiency decreases when the natural frequency deviates from the drive frequency

Engineering Contradiction:
Improveoperational efficiencyVSAvoidfrequency adaptability
Core Design Contradiction:
ProductivityVSAdaptability or versatility

Solution Approach 1:

The patent measures the natural frequency of the piezoelectric vibrator in advance during the manufacturing process, before the device is put into actual use. This preliminary measurement allows the optimal drive frequency to be determined beforehand, so that when the device operates, it can use the pre-determined optimal frequency, thereby maintaining high efficiency without needing real-time adjustment.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent implements a feedback mechanism where the measured natural frequency information is used to determine and set the drive frequency. By measuring the actual natural frequency of each device and using this information to configure the optimal drive frequency, the system adapts to individual device variations, ensuring maximum operational efficiency for each unit.

Inventive Principle:
Principle #23Feedback

2Productivity

If inspection and adjustment of drive frequency is performed each time natural frequency deviates, then optimal operation can be maintained, but the process becomes complex and difficult to implement

Engineering Contradiction:
Improveoperational efficiencyVSAvoidinspection complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent performs the frequency measurement and determination action in advance during manufacturing, before the device is deployed. This eliminates the need for complex inspection and adjustment procedures during operation, as the optimal drive frequency has already been determined and configured based on preliminary measurements taken during production.

Inventive Principle:
Principle #10Preliminary action

3Adaptability or versatility

If structural variations are controlled during manufacturing, then natural frequency can be standardized, but manufacturing precision requirements increase

Engineering Contradiction:
Improvefrequency consistencyVSAvoidstructural precision
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The patent measures the actual natural frequency of each piezoelectric vibrator individually, acknowledging that structural variations will occur during manufacturing. Instead of trying to control these variations through tighter manufacturing tolerances, the invention accepts the variations and uses measurement to determine the optimal drive frequency for each device, thereby maintaining frequency consistency in operation without requiring excessive manufacturing precision.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for precise determination and adjustment of the natural frequency, enhancing the efficiency of piezoelectric vibrators and transducers by ensuring optimal operation at resonance frequencies.

Implementation Method 1

generating an electric field in a piezoelectric film of the piezoelectric element to displace the vibrating membrane

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

acquiring power-generating wave information of the piezoelectric vibrator from vibration of the vibrating membrane

Methodology Applied
Scientific EffectPiezoelectric effect: Converse Piezoelectric Effect

Implementation Method 3

acquiring current information by electromagnetic induction from a wiring arranged on the vibrating membrane

Methodology Applied
Scientific EffectElectromagnetic induction: Electromagnetic Induction

Data Source

PatentUS20230375436A1Method of evaluating natural frequency of piezoelectric vibrator, method of driving transducer, signal transmitting/receiving device, and drive system
Publication Date: 2023.11.23 ROHM CO LTD
  • US20230375436A1 patent drawing
  • US20230375436A1 patent drawing
  • US20230375436A1 patent drawing

AI summary

A method of evaluating a natural frequency of a piezoelectric vibrator including a vibrating membrane and a piezoelectric element, includes: acquiring power-generating wave information of the piezoelectric vibrator from vibration of the vibrating membrane, which is caused by generating an electric field in a piezoelectric film of the piezoelectric element to displace the vibrating membrane and then extinguishing the electric field in a state where the vibrating membrane is displaced; and measuring a period of a power-generating wave based on the power-generating wave information and determining a reciprocal of the period as the natural frequency of the piezoelectric vibrator.