Piezoelectric Actuator Wall Asymmetry for Ultrasound Resonance Control

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Solution Overview

Problem

Existing ultrasound sensors suffer from unnecessary frequency vibrations due to resonance of partition walls with the same shape and physical properties, leading to inefficient transmission and reception of ultrasound waves.

Innovation Solution

A piezoelectric actuator design featuring a substrate with a vibrating plate, suppression parts, and partition walls of different widths, heights, or lengths, or physical properties, which reduces resonance coupling and suppresses unwanted frequency vibrations by ensuring distinct resonance frequencies for each wall.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If partition walls with the same shape and physical properties are used, then the structure is simple and easy to manufacture, but resonance occurs at unnecessary frequencies leading to poor ultrasound transmission quality

Engineering Contradiction:
Improveease of manufactureVSAvoidultrasound transmission quality
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent applies asymmetry by configuring partition walls with different shapes or physical properties (such as different thicknesses, materials, or structures) to prevent symmetric resonance patterns. This asymmetry disrupts the uniform vibration modes that cause unnecessary frequency resonances, thereby improving ultrasound transmission quality while maintaining manufacturing feasibility through standardized production processes for varied geometries.

Inventive Principle:
Principle #4Asymmetry

Solution Approach 2:

The patent implements local quality by varying the physical properties or dimensions of specific partition walls rather than using uniform structures throughout. This allows targeted control of resonance characteristics in different regions of the piezoelectric actuator, suppressing unwanted frequencies locally while maintaining overall structural integrity and manufacturability.

Inventive Principle:
Principle #3Local quality

2Reliability

If partition walls are made with different shapes or physical properties, then resonance at unnecessary frequencies is suppressed, but the device complexity and manufacturing difficulty increase

Engineering Contradiction:
Improveultrasound transmission qualityVSAvoiddevice complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent uses asymmetry in partition wall design to suppress resonance, accepting increased device complexity as a necessary trade-off for achieving reliable ultrasound transmission. The asymmetric configurations are implemented through precise manufacturing processes that, while more complex than uniform structures, remain feasible using standard fabrication techniques with controlled tolerances.

Inventive Principle:
Principle #4Asymmetry

Solution Approach 2:

The patent applies parameter changes by systematically varying physical parameters of partition walls (such as thickness, material composition, or geometric dimensions) to control resonance characteristics. This approach manages device complexity through parameter optimization rather than structural reconfiguration, allowing quality improvement while maintaining manufacturing practicality.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If partition walls with different shapes are used, then frequency characteristics become more uniform, but manufacturing precision requirements increase

Engineering Contradiction:
Improvefrequency characteristics uniformityVSAvoidmanufacturing precision
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent implements asymmetry in partition wall design to achieve uniform frequency characteristics, recognizing that this requires higher manufacturing precision. The asymmetric geometries are designed with tolerances that balance the need for precise resonance control with practical manufacturing capabilities, ensuring frequency uniformity without requiring extreme precision that would be costly or difficult to achieve.

Inventive Principle:
Principle #4Asymmetry

Solution Approach 2:

The patent uses parameter changes in partition wall dimensions and properties to control frequency characteristics, where precise parameter control is achieved through optimized manufacturing processes. The parameter variations are designed to be within achievable tolerances, balancing frequency uniformity requirements with manufacturing precision capabilities.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design enhances the accuracy and stability of ultrasound wave transmission and reception by minimizing unnecessary frequency vibrations, achieving uniform frequency characteristics and increased Q-value of the piezoelectric element.

Implementation Method 1

a piezoelectric element provided corresponding to the opening at a second surface of the vibrating plate on a side opposite to the first surface... a first electrode, a piezoelectric layer and a second electrode are stacked in this order from the second surface side

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

a reception circuit configured to cause the piezoelectric actuator to receive ultrasound waves

Methodology Applied
Scientific EffectConverse piezoelectric effect: Converse Piezoelectric Effect

Data Source

PatentUS11998390B2Piezoelectric actuator, ultrasound element, ultrasound probe, ultrasound device, and electronic device
Publication Date: 2024.06.04 SEIKO EPSON CORP
  • US11998390B2 patent drawing
  • US11998390B2 patent drawing
  • US11998390B2 patent drawing

AI summary

A piezoelectric actuator includes a vibrating plate including a first surface that closes an opening provided in a substrate and a second surface in which a plurality of piezoelectric elements is provided, a suppression part configured to suppress a vibration of the vibrating plate, and a first wall and a second wall protruding from the first surface to the opening. When a portion where the first electrode, the piezoelectric layer and the second electrode overlap each other is an active part of the piezoelectric element, the first wall and the second wall are provided to sandwich the active part in plan view from the stacking direction of the first electrode, the piezoelectric layer and the second electrode, and the second wall is different from the first wall at least in one of the width, height, length and physical property.