Piezoelectric Element Titanium Interlayer Orientation Control

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Solution Overview

Problem

Existing piezoelectric elements with a strongly oriented substrate can result in insufficient orientation of the piezoelectric layer, leading to suboptimal piezoelectric characteristics, especially when a PZT layer is formed on an orientation control layer without adequate cancellation of the substrate's orientation influence.

Innovation Solution

Incorporating a titanium layer between the first electrode and the orientation control layer, which contains at least Ti, to cancel the orientation influence from the substrate and ensure proper orientation of the piezoelectric layer, thereby improving the piezoelectric characteristics of the element.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Stability of the object's composition

If a strongly oriented substrate is used, then the substrate provides structural stability, but the piezoelectric layer becomes insufficiently oriented

Engineering Contradiction:

Improvesubstrate structural stabilityVSAvoidpiezoelectric layer orientation

Core Design Contradiction:

Stability of the object's compositionVSManufacturing precision

Solution Approach 1:

The patent introduces a titanium layer as an intermediary between the strongly oriented substrate and the piezoelectric layer. This intermediate layer cancels the orientation influence from the substrate, allowing the piezoelectric layer to achieve proper orientation despite the substrate's strong orientation. The titanium layer acts as a mediator that blocks the transmission of orientation effects from the substrate to the piezoelectric layer.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Manufacturing precision

If an orientation control layer is added to control piezoelectric layer orientation, then orientation control is improved, but the substrate's orientation influence is not adequately canceled

Engineering Contradiction:

Improvepiezoelectric layer orientation controlVSAvoidlayer structure complexity

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The titanium layer serves as an intermediary that specifically addresses the substrate's orientation influence. By placing this layer between the substrate and the orientation control layer, it effectively cancels the unwanted orientation effects from the substrate, allowing the orientation control layer to function more effectively without being counteracted by substrate orientation.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent segments the functional layers into distinct components: the titanium layer for canceling substrate orientation influence, the orientation control layer for controlling piezoelectric layer orientation, and the piezoelectric layer itself. This segmentation allows each layer to perform its specific function independently, improving overall orientation control while managing complexity through functional decomposition.

Inventive Principle:

Principle #1Segmentation

3Reliability

If the piezoelectric layer orientation is insufficient, then piezoelectric characteristics are improved, but ejection efficiency deteriorates

Engineering Contradiction:

Improvepiezoelectric characteristicsVSAvoidejection efficiency

Core Design Contradiction:

ReliabilityVSProductivity

Solution Approach 1:

The titanium layer acts as an intermediary that eliminates the conflicting orientation influence from the substrate, enabling the piezoelectric layer to achieve optimal orientation for both reliable piezoelectric characteristics and high ejection efficiency. This intermediate layer resolves the contradiction by creating conditions where proper orientation can be achieved.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent changes the orientation parameter of the piezoelectric layer by introducing the titanium layer that cancels substrate orientation influence. This parameter change enables the piezoelectric layer to achieve the optimal orientation state that simultaneously provides reliable piezoelectric characteristics and high ejection efficiency, resolving the contradiction between these two performance aspects.

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The titanium layer effectively orients the piezoelectric layer, enhancing its performance by ensuring it is optimally aligned, thus improving the overall piezoelectric characteristics and ejection efficiency in liquid ejecting applications.

Implementation Method 1

a titanium layer that is provided between the first electrode and the orientation control layer and that contains at least Ti

Methodology Applied

Scientific EffectCrystallographic orientation:

Implementation Method 2

a piezoelectric element in which a first electrode, a piezoelectric layer, and a second electrode are stacked in order on a substrate

Methodology Applied

Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS12022735B2Piezoelectric element, liquid ejecting head, and liquid ejecting apparatus

Publication Date: 2024.06.25 SEIKO EPSON CORP

AI summary

A piezoelectric element in which a first electrode, a piezoelectric layer, and a second electrode are stacked on a substrate is provided. The piezoelectric element is a piezoelectric element in which the first electrode, the piezoelectric layer, and the second electrode are stacked in order on the substrate and includes an orientation control layer that is provided between the piezoelectric layer and the first electrode and that controls orientation of the piezoelectric layer and a titanium layer that is provided between the first electrode and the orientation control layer and that contains at least Ti.