Piezoresistive NEMS Array Network for Analyte Detection

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Solution Overview

Problem

Individual nanoelectromechanical resonators face challenges in sensitivity and power handling due to their small size, making it difficult to detect analytes at low concentrations, and existing sensor arrays lack ease of use, robustness, and optimal sensitivity.

Innovation Solution

A sensor array comprising a large number of resonators arranged in rows and columns, electrically coupled in a combined series-parallel configuration, allowing them to vibrate at the same frequency and phase, enhancing signal-to-noise ratio and power handling capabilities.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If individual NEMS resonators are used, then sensitivity to external perturbations is high, but power handling capability and signal magnitude decrease

Engineering Contradiction:
ImprovesensitivityVSAvoidpower handling capability
Core Design Contradiction:
Measurement precisionVSPower

Solution Approach 1:

The patent combines multiple individual NEMS resonators into an array configuration where they are mechanically coupled through a common substrate. This merging approach allows the system to maintain the high sensitivity of individual resonators while collectively handling higher power levels and producing larger signal magnitudes through the combined response of multiple elements.

Inventive Principle:
Principle #5Merging (Combining)

2Measurement precision

If NEMS sensor size is reduced, then sensitivity to external perturbations increases, but interaction cross-section with analytes decreases

Engineering Contradiction:
ImprovesensitivityVSAvoidinteraction cross-section
Core Design Contradiction:
Measurement precisionVSArea of stationary object

Solution Approach 1:

The patent creates an array of multiple small NEMS resonators that are individually sensitive due to their small size. By combining them in a mechanically coupled array, the system achieves a large effective interaction cross-section equal to the sum of all individual resonator cross-sections, while each resonator maintains its high sensitivity characteristics.

Inventive Principle:
Principle #5Merging (Combining)

3Measurement precision

If NEMS sensor size is reduced, then sensitivity to external perturbations increases, but detection of trace analyte levels becomes difficult

Engineering Contradiction:
ImprovesensitivityVSAvoiddetection reliability
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The patent combines multiple individual NEMS resonators into an array where their responses are integrated. This merging provides statistical averaging that reduces the impact of stochastic absorption/desorption events on individual resonators, thereby improving the reliability and robustness of trace analyte detection while maintaining the high sensitivity of small-sized resonators.

Inventive Principle:
Principle #5Merging (Combining)

4Measurement precision

If sensor arrays are created to scale up interaction cross-section, then sensitivity is enhanced, but device complexity increases

Engineering Contradiction:
ImprovesensitivityVSAvoidarray configuration complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent segments the sensor array into modular units with standardized resonator designs and systematic interconnections. This segmentation allows for simplified fabrication processes, easier integration, and reduced overall complexity by breaking down the complex array into manageable, repeating structural units that can be manufactured using standard techniques.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution significantly improves sensitivity and robustness, enabling detection of analytes at parts per billion concentrations with enhanced power handling and signal-to-noise ratios, overcoming the limitations of individual resonators.

Implementation Method 1

Piezoresistive NEMS array network

Methodology Applied
Scientific EffectPiezoresistive effect: Piezoresistive Effect

Implementation Method 2

resonators are adapted to independently vibrate at about the same resonance frequency

Methodology Applied
Scientific EffectResonance: Resonance

Data Source

PatentUS9291600B2Piezoresistive NEMS array network
Publication Date: 2016.03.22 CALIFORNIA INST OF TECH
  • US9291600B2 patent drawing
  • US9291600B2 patent drawing
  • US9291600B2 patent drawing

AI summary

A sensor for detecting analytes, a method of making the sensor, and a method of using the sensor. In one embodiment, the present invention comprises at least one array comprising a plurality of resonators. The resonators can be arranged in a plurality of rows and a plurality of columns, and can be connected in a combined series-parallel configuration. The resonators can be adapted to vibrate independently at about the same resonance frequency and about the same phase. The sensor can also comprise an actuator and a signal detector electrically coupled to the array. The sensor can also further comprise an analyte delivery system and can be functionalized for detection of at least one analyte.