Silicon Particle Template Spheroidization for Uniform Spherical Output

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Solution Overview

Problem

Conventional methods for manufacturing silicon nanoparticles face challenges such as ununiform shapes, wide size distribution, and difficulty in controlling particle size, particularly in achieving large quantities of uniform spherical particles.

Innovation Solution

A method involving forming a structure with a protruding shape on a first substrate, heating and diffusing the material to form spherical particles, and collecting them on a second substrate, with controlled diameter and aspect ratio modification of the cylindrical pillars to achieve uniform size.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional top-down methods (electrochemical etching, mechanical milling, laser ablation) are used to manufacture silicon nanoparticles, then crystallinity and quality are improved, but particle shape uniformity deteriorates and size distribution becomes wide

Engineering Contradiction:
ImprovecrystallinityVSAvoidparticle shape uniformity
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The bulk silicon substrate is segmented into multiple discrete cylindrical pillars through patterning processes. Each pillar serves as an independent template for nanoparticle formation, allowing precise control over the number, size, and distribution of resulting nanoparticles. This segmentation enables uniform particle shapes while maintaining high crystallinity by preserving the ordered atomic structure during the bottom-up growth process.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Cylindrical pillar structures are formed on the silicon substrate before nanoparticle synthesis. These pillars serve as pre-formed templates that define the spatial arrangement and dimensional constraints for subsequent nanoparticle growth. The preliminary formation of pillars with controlled diameter and height ensures uniform nanoparticle characteristics before the actual particle formation occurs.

Inventive Principle:
Principle #10Preliminary action

2Productivity

If conventional bottom-up methods (thermal decomposition of silane, reduction of silicon tetrachloride) are used to manufacture silicon nanoparticles, then mass production capability is improved, but particle size control deteriorates and size distribution becomes wide

Engineering Contradiction:
Improvemass production capabilityVSAvoidparticle size control
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

Different regions of the substrate are engineered with specific local characteristics through the formation of cylindrical pillars with controlled dimensions. Each pillar region provides localized nucleation and growth conditions that are optimized for producing nanoparticles of precise size. This local quality control allows mass production while maintaining tight size distribution through uniform pillar specifications.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The diameter and height parameters of the cylindrical pillars are precisely controlled during fabrication to directly determine nanoparticle size. By adjusting these geometric parameters, the nanoparticle dimensions can be tuned with high precision. The controlled parameter changes in pillar formation enable both high productivity and tight size control simultaneously.

Inventive Principle:
Principle #35Parameter changes

3Productivity

If magnesium thermal reduction of silica nanoparticles is used to manufacture silicon nanoparticles, then production efficiency is improved, but particle size uniformity deteriorates and incomplete reduction products are generated

Engineering Contradiction:
Improveproduction efficiencyVSAvoidparticle size uniformity
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The method extracts and eliminates the problematic magnesium thermal reduction step from the conventional silica reduction process. Instead, it uses a direct bottom-up approach where silicon material is deposited and formed into nanoparticles on cylindrical pillar templates. This extraction of the problematic reduction step avoids incomplete reduction products while maintaining production efficiency through direct nanoparticle formation.

Inventive Principle:
Principle #2Taking out (Extraction)

4Ease of manufacture

If conventional methods are used to manufacture silicon nanoparticles, then existing production processes are maintained, but particle size distribution becomes wide and size control becomes difficult

Engineering Contradiction:
Improveprocess maintenanceVSAvoidparticle size distribution
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

Cylindrical pillar templates are prepared in advance with precisely controlled dimensions before nanoparticle formation. This preliminary templating action establishes uniform size constraints that are inherited by the resulting nanoparticles. The preliminary preparation of standardized pillars enables easy maintenance of existing manufacturing processes while achieving tight size distribution through the template effect.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables the production of large quantities of uniform spherical silicon particles with high crystallinity and minimal size deviation, addressing the limitations of existing methods.

Implementation Method 1

forming a particle for heating and diffusing the structure of the first substrate to form a spherical particle from the diffused material of the structure

Methodology Applied
Scientific EffectHeating: Heating

Implementation Method 2

forming a particle for heating and diffusing the structure of the first substrate to form a spherical particle from the diffused material of the structure

Methodology Applied
Scientific EffectDiffusion: Diffusion

Data Source

PatentUS20260049415A1Particle manufacturing method and particle manufacturing device
Publication Date: 2026.02.19 KOREA ADVANCED INST OF SCI & TECH
  • US20260049415A1 patent drawing
  • US20260049415A1 patent drawing
  • US20260049415A1 patent drawing

AI summary

A particle manufacturing method is disclosed. A particle manufacturing method according to one aspect of the present disclosure as a method of forming a spherical particle may include forming a structure for forming a structure of a protruding shape with a material composing of the particle on a first substrate, disposing substrates for disposing the first substrate such that the structure faces downward and disposing a second substrate facing the first substrate below the first substrate, forming a particle for heating and diffusing the structure of the first substrate to from a spherical particle from the diffused material of the structure, and collecting a particle for collecting particles by landing the spherical particles falling from the first substrate on the second substrate.