Substrate Supporting Pin Autoalignment Mechanism
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Solution Overview
Problem
In deposition apparatuses, substrate supporting pins are prone to damage due to friction with lift pin holes, leading to inaccurate substrate loading and unloading, which can result in substrate damage and contamination.
Innovation Solution
An autoalignment control unit with a weight and alignment guide ring, made of low-friction materials like Teflon or ceramic, is integrated with the substrate supporting pin to prevent damage by allowing horizontal movement and alignment within a defined range, reducing friction and ensuring accurate positioning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If a fixed substrate supporting pin is used, then the pin is stable and easy to manufacture, but the pin is damaged due to friction with the lift pin hole
Solution Approach 1:
The substrate supporting pin is changed from a fixed structure to a movable structure that can automatically align with the lift pin hole. The pin is allowed to move horizontally within a predetermined range to accommodate misalignment, reducing friction and preventing damage while maintaining operational stability.
Solution Approach 2:
An autoalignment control unit with alignment guide rings is introduced as an intermediary mechanism between the pin and the hole. This intermediary structure guides the pin's movement and ensures proper alignment, preventing direct frictional contact that would cause damage.
2Ease of operation
If a non-fixed substrate supporting pin is used, then the pin can move vertically for loading and unloading, but the pin is damaged due to suspension and friction
Solution Approach 1:
The pin is designed with dual mobility - vertical movement for substrate loading/unloading and horizontal movement for alignment. This dynamic design allows the pin to adapt to positional variations while maintaining structural integrity and preventing friction-related damage.
Solution Approach 2:
The solution adds horizontal movement capability to the traditionally vertical-moving pin. By enabling movement in another dimension (horizontal alignment), the system prevents friction damage while preserving the essential vertical loading function.
3Manufacturing precision
If the substrate supporting pin is damaged or misaligned, then the substrate cannot be loaded and unloaded accurately, but adding alignment mechanisms increases device complexity
Solution Approach 1:
The alignment system is designed to be self-aligning through gravity and geometric constraints. The alignment guide rings and movable pin structure automatically correct misalignment without requiring external control systems, actuators, or complex feedback mechanisms, thus maintaining simplicity while achieving high positioning accuracy.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents substrate supporting pin damage and ensures accurate substrate handling, reducing yield loss by minimizing friction and maintaining pin integrity during loading and unloading processes.
Implementation Method 1
an autoalignment control unit which controls a position of the substrate supporting pin, and comprises a weight
Implementation Method 2
The weight and the alignment guide ring may be made of Teflon or ceramic
Data Source
AI summary
A deposition apparatus includes a substrate supporting pin that is fixed to a supporting plate through an autoalignment control unit to prevent the substrate supporting pin from being broken when loading or unloading a substrate, thereby preventing damaging the substrate and also preventing decreased yield that may result due to the breakage of the substrate supporting pin.