Pin Control Method for Substrate Processing Apparatus
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Solution Overview
Problem
In substrate processing apparatuses, the difference in height positions of pins due to base member inclination or uneven driving speeds leads to substrate misalignment, which is not effectively addressed by existing control methods.
Innovation Solution
A pin control method that measures the height positions of pins driven by multiple units, selects a reference pin, estimates a reference height position, calculates adjustment speeds for other pins to match this position, and controls their driving units to adjust their speeds accordingly, ensuring synchronized pin movement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a single driving unit vertically drives a base member to which multiple pins are attached, then the structure is simple and ease of manufacture is improved, but the pins cannot be driven independently leading to substrate misalignment
Solution Approach 1:
The single base member structure is segmented into multiple independent pin units, each with its own driving unit. This allows independent control of each pin while maintaining the overall simplicity of the substrate processing apparatus structure.
Solution Approach 2:
The system transitions from static collective pin movement to dynamic independent pin control. Each pin can be driven at different speeds and positions dynamically adjusted based on real-time height position measurements, enabling precise substrate positioning.
2Manufacturing precision
If multiple driving units are used to drive pins independently, then substrate positioning precision is improved, but the device complexity increases
Solution Approach 1:
Multiple driving units are designed with identical structures and functions, each capable of driving a pin independently. This universal design reduces overall system complexity by using standardized components rather than custom-designed individual drivers.
Solution Approach 2:
Height position detection units provide real-time feedback on pin positions to the control unit, which automatically adjusts driving speeds to maintain synchronized pin movement. This closed-loop control system simplifies the complexity by providing automatic adjustment rather than requiring complex manual coordination.
3Adaptability or versatility
If pins are driven at different speeds without coordination, then adaptability to height variations is improved, but substrate misalignment occurs due to lack of synchronization
Solution Approach 1:
Height position detection units continuously monitor pin positions and provide feedback to the control unit. The control unit uses this information to calculate and adjust driving speeds in real-time, ensuring all pins remain synchronized while adapting to height variations.
Solution Approach 2:
The system dynamically changes driving speed parameters based on measured height positions. By adjusting the speed parameter of each driving unit according to real-time feedback, the system maintains synchronization while adapting to variations in pin heights or substrate position.
Data Source
AI summary
A substrate processing apparatus includes a processing container; a placement table; a plurality of pins provided on the placement table configured to perform delivery of the substrate; a plurality of drivers configured to vertically drive the plurality of pins, respectively; a plurality of measuring devices each including an encoder configured to measure height positions of the plurality of pins, respectively. The substrate processing apparatus also includes a controller configured to: measure the height positions of the plurality of pins; select a reference pin; estimate a reference height position; calculate an adjustment speed for making the height positions of the pins other than the reference pin match with the estimated reference height position; and control the drivers, which drive the other pins, to adjust driving speeds of the other pins to an adjustment speed.