Substrate Support Pin Installation Jig for Semiconductor Manufacturing
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Solution Overview
Problem
Existing methods for installing substrate support pins on a support base are cumbersome and often require operators to work in difficult positions, lacking a novel and efficient solution for pin installation.
Innovation Solution
A substrate support pin installation jig with a main body that moves relative to the support base, featuring multiple pin accommodating portions and a positioned portion for precise alignment, allows for the collective installation of support pins at predetermined positions on the support base.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple support pins are installed individually using existing methods, then each pin can be installed at the correct position, but the installation process becomes cumbersome and time-consuming
Solution Approach 1:
The patent combines multiple pin installation operations into a single jig that can install multiple pins simultaneously. The jig base integrates multiple pin accommodation holes and positioning features, allowing operators to install several support pins in one operation rather than individually, thereby improving productivity and reducing installation time.
Solution Approach 2:
The jig base is pre-configured with multiple pin accommodation holes at predetermined positions and integrated positioning portions that align with the support base. This preliminary preparation of the jig allows for rapid and accurate pin installation without requiring separate positioning operations for each pin, thus reducing installation time while maintaining precision.
2Ease of operation
If operators install pins at difficult positions using existing methods, then pins can be installed, but operator effort increases and work becomes more difficult
Solution Approach 1:
The jig base serves multiple functions: it holds multiple pins simultaneously, provides integrated positioning to align with the support base, and facilitates easy installation at various positions. This multi-functionality consolidates what would otherwise require multiple separate tools or operations, making the installation process easier while managing complexity through design integration.
3Manufacturing precision
If pins are installed without precise positioning, then installation is faster, but positioning accuracy decreases
Solution Approach 1:
The jig base is pre-configured with multiple pin accommodation holes at predetermined positions and integrated positioning portions that align with the support base. This preliminary preparation of the jig allows for rapid and accurate pin installation without requiring separate positioning operations for each pin, thus reducing installation time while maintaining precision.
Solution Approach 2:
The jig base acts as an intermediary tool between the operator and the support base. It provides the positioning function through its integrated positioning portions that engage with the support base, allowing pins to be installed at precise locations without requiring the operator to manually position each pin, thereby maintaining accuracy while improving installation speed.
Data Source
AI summary
There is provided a novel substrate support pin installation jig used when installing a substrate support pin for supporting a circuit substrate. The substrate support pin installation jig (hereinafter, may be simply referred to as a jig) according to the present disclosure includes a main body configured to move relative to a support base, multiple pin accommodating portions provided in the main body, and a positioned portion used for positioning on the support base. The substrate support pin is accommodated and held in at least one of multiple pin accommodating portions in the jig. The jig is placed on the support base in a state where a relative position is specified by the positioned portion. By releasing holding of the substrate support pin, the substrate support pin is installed on the support base, and then the jig is removed.