Pin Lifter Position Monitoring via Motor Current Feedback
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Solution Overview
Problem
Pin lifter systems in vacuum chamber systems face challenges in accurately positioning and monitoring substrates due to the need for precise control of support pins, which can lead to substrate damage and require frequent replacement, and involve time-consuming calibration and monitoring processes.
Innovation Solution
A pin lifter system with a coupling and electric motor drive unit that allows for adjustable support pins, enabling monitoring of motor current to detect substrate contact and position, and a control unit for automated positioning and regulation of the support pins, ensuring accurate and safe handling of substrates.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If support pins are used to position and support the substrate, then positioning accuracy and load distribution are improved, but substrate damage occurs due to impact forces during contact
Solution Approach 1:
The patent applies beforehand cushioning by introducing a damping element between the support pin and the substrate. This damping element absorbs impact forces during contact, preventing substrate damage while maintaining positioning accuracy. The cushioning is prepared in advance through the design of the support pin structure that incorporates the damping material.
Solution Approach 2:
The damping element acts as an intermediary between the support pin and the substrate. It mediates the contact interaction by reducing impact forces while still allowing the support pin to provide positioning and load distribution functions. This intermediary component protects the substrate from direct impact forces.
2Manufacturing precision
If manual calibration and monitoring of pin lifter position is performed, then positioning accuracy can be achieved, but processing time is increased
Solution Approach 1:
The patent applies feedback by using a sensor to detect the position of the support pin and provide this information to the control unit. The control unit automatically adjusts the pin lifter position based on the sensor feedback, eliminating the need for manual calibration and reducing processing time while maintaining positioning accuracy.
Solution Approach 2:
The pin lifter system performs self-calibration through the automated feedback control mechanism. The sensor continuously monitors the position and the control unit automatically makes adjustments, allowing the system to self-regulate without external intervention, thereby reducing calibration time and increasing efficiency.
3Manufacturing precision
If support pins are frequently replaced due to wear, then positioning accuracy is maintained, but device complexity and operational interruptions increase
Solution Approach 1:
The damping element serves as a sacrificial component that absorbs wear instead of the support pin. By beforehand cushioning the contact between the pin and substrate, the support pin experiences reduced wear and can be replaced less frequently, maintaining positioning accuracy while reducing maintenance complexity.
Solution Approach 2:
The damping element functions as a disposable component that absorbs wear and degradation. Instead of replacing the expensive support pin frequently, the cheaper damping element is designed to be replaced, thereby reducing overall maintenance complexity and operational interruptions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution simplifies and automates the positioning of support pins, reduces substrate damage, and allows for continuous monitoring of the pin lifter system, enabling efficient and precise handling of substrates during processing, while extending the lifespan of support pins by reducing wear and tear.
Implementation Method 1
a drive unit having an electric motor, which is designed and interacts with the coupling in such a way that the coupling is adjustable linearly along an adjustment axis
Implementation Method 2
progressively receiving a present item of motor current information with respect to a motor current applied to the electric motor, comparing the present motor current information to an item of target current information
Data Source
AI summary
Method for monitoring a state of a pin lifter device (10), wherein the pin lifter device (10) is designed for moving and positioning a substrate in a process atmosphere region (P). The pin lifter device (10) has a coupling (18) and a drive unit (12) having an electric motor, which is designed and interacts with the coupling (18) in such a way that the coupling (18) is adjustable from a lowered normal position into an individual active position and back. The method for monitoring includes progressively receiving a present item of motor current information with respect to a motor current applied to the electric motor, comparing the present motor current information to an item of target current information, and deriving an item of state information based on the comparison.