Pin-Lifter Positioning Compensation for Substrate Alignment
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing pin lifting devices face challenges in precisely and robustly handling substrates during processing, leading to potential misalignment, torsions, and increased processing times, which can result in deteriorated processing results.
Innovation Solution
A pin lifting device with a lifting unit, drive unit, and an adjusting structure that allows movement in additional degrees of freedom beyond the primary linear axis, enabling precise positioning and alignment of substrates through controlled actuation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a pin lifting device is used to handle substrates, then the substrate can be supported and positioned, but misalignment and torsions may occur leading to deteriorated processing results
Solution Approach 1:
The lifting pins are made adjustable in position along the movement axis, transforming a static pin lifting device into a dynamic one. This allows the pins to adapt to substrate position variations and be precisely positioned, thereby improving both positioning precision and processing result quality simultaneously
Solution Approach 2:
The position parameter of the lifting pins along the movement axis is made variable through adjustment mechanisms. By changing the pin positions to match the actual substrate location, the system achieves precise alignment and eliminates misalignment-induced processing errors
2Productivity
If the substrate is handled quickly to reduce processing time, then productivity increases, but substrate breakage risk increases due to adhesive forces and impact
Solution Approach 1:
The lifting pins enable dynamic, controlled movement of the substrate throughout the process chamber. This controlled mobility allows the substrate to be transported quickly yet safely, maintaining integrity while improving processing speed
Solution Approach 2:
Multiple lifting pins are distributed across the substrate surface, dividing the support function into multiple contact points. This load distribution prevents localized stress concentration and impact damage, enabling faster handling without compromising substrate strength
3Productivity
If multiple substrates are processed simultaneously to increase throughput, then productivity improves, but positioning and orientation control becomes more challenging
Solution Approach 1:
Multiple independent lifting pins are used to support multiple substrates simultaneously. Each pin can be independently adjusted and controlled, allowing precise positioning and orientation of each substrate individually even when multiple substrates are processed in parallel
Solution Approach 2:
The pin lifting device provides universal support capabilities for multiple substrates of the same type. The same pin mechanism serves multiple substrates simultaneously, maintaining consistent positioning precision and orientation control across all substrates processed in parallel
Data Source
Figure 1~2
Figure 3a~4b
AI summary
Pin lifting device (10) configured for moving and positioning a substrate (1) to be processed in a process atmosphere region (P), the pin lifting device (10) comprises a lifting unit with a mount (11) configured to hold at least one lift pin (7a-7c) and a drive unit (14) which is connected to the mount (11) and which interacts with the mount (11) in such a way that the mount (11) is movable along a movement axis (M) from a lowered normal position into an elevated lifting position, and back again. The pin lifting device (10) comprises an adjusting structure (21) configured to interact with the lifting unit and an actuating unit (22) coupled to the adjusting structure (21) and coupled to the lifting unit so that movement of the adjusting structure (21) relative to the lifting unit according to at least one degree of freedom different from the moveability along the movement axis (M) is providable.