Pin Lifting Assembly With Compensation Bearing for Easy Alignment
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Solution Overview
Problem
The assembly and maintenance of pin lifting devices in vacuum process chambers are labor-intensive due to the need for precise alignment of lifting pins with substrate carriers, which requires tight tolerances and increased effort.
Innovation Solution
A pin lifting device with a compensation bearing that allows relative movement between the lifting pin holder and the lifting drive in orthogonal directions, simplifying assembly and maintenance by accommodating tolerance ranges and temperature-related geometric variations, and enabling interchangeable lifting pins.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the opening diameters of the feedthroughs are very precisely adapted to the lifting pins, then the alignment precision is improved, but the assembly effort and adjustment complexity increase
Solution Approach 1:
The invention changes the parameter of the feedthrough opening diameter from a precisely adapted value to a larger value that exceeds the lifting pin diameter. This parameter change allows the lifting pin to be inserted without precise alignment, significantly reducing assembly effort while maintaining operational precision through the compensation bearing.
Solution Approach 2:
The compensation bearing acts as an intermediary element between the lifting pin holder and the lifting drive. It compensates for misalignment and tolerance variations, enabling the use of larger feedthrough openings without compromising the precision of the lifting operation. The bearing mediates between the imprecise insertion and the precise lifting requirement.
2Reliability
If tight tolerances are required for lifting pin alignment, then the operational precision is improved, but the device complexity and adjustment effort increase
Solution Approach 1:
The invention changes the tolerance parameter of the feedthrough opening diameter to be larger than the lifting pin diameter. This parameter change decouples the operational precision requirement from the assembly tolerance requirement, allowing simple assembly while maintaining reliable operation through the compensation mechanism.
Solution Approach 2:
The compensation bearing introduces a dynamic element that allows for automatic adjustment and compensation of alignment variations during operation. This dynamic compensation mechanism replaces the need for static precise alignment, simplifying the device structure while maintaining operational reliability.
3Measurement precision
If precise alignment is required during assembly, then the lifting accuracy is improved, but the maintenance time and labor increase
Solution Approach 1:
The compensation bearing serves as a mediator that separates the lifting accuracy function from the alignment function. During maintenance, the bearing automatically compensates for any alignment variations, allowing quick replacement of lifting pins without time-consuming alignment procedures, thus reducing maintenance time while preserving lifting accuracy.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The compensation bearing reduces assembly and maintenance efforts by allowing for automatic offset compensation between the lifting pin holder and substrate carrier, while also enabling smooth and low-friction movement, thus improving operational efficiency and flexibility.
Implementation Method 1
The compensation bearing enables a relative movement between the lifting drive and the lifting pin holder in at least one direction orthogonal to the linear lifting motion path
Data Source
AI summary
A pin lifting device (1) for lowering a substrate (2) onto a substrate carrier (15) and for lifting the substrate (2) off the substrate carrier (15) in a process chamber, in particular a vacuum process chamber. The pin lifting device (1) includes at least one lifting pin holder (4) and at least one lifting drive (5) for moving the lifting pin holder (4), which has a lifting pin (6) mounted thereon, in a reciprocating manner along a linear lifting motion path (7). The lifting pin holder (4) is mounted on the lifting drive (5) by a compensation bearing (8), and the compensation bearing (8) facilitates a relative movement between the lifting drive (5) and the lifting pin holder (4) in at least one direction (9) orthogonal to the linear lifting motion path (7).